Film forming method, film forming machine, device manufacturing method, apparatus and electronic equipment

A technology for equipment manufacturing and membrane devices, which is applied in the fields of membrane manufacturing and devices, equipment manufacturing and devices, equipment, and electronic equipment, and can solve problems such as adverse effects of membrane element characteristics and degradation of display quality

Inactive Publication Date: 2005-05-04
SEIKO EPSON CORP
View PDF1 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In this way, if the fusion is insufficient, the unevenness may become large, which may adversely affect the characteristics of the element provided with the film.
In addition, when the relative movement of the print head and the substrate changes the line, there will be a slight step difference along the position of the line change, that is, the so-called line-feed misalignment, which may reduce the display quality

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Film forming method, film forming machine, device manufacturing method, apparatus and electronic equipment
  • Film forming method, film forming machine, device manufacturing method, apparatus and electronic equipment
  • Film forming method, film forming machine, device manufacturing method, apparatus and electronic equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0046] First, the film forming apparatus included in the device manufacturing apparatus will be described.

[0047] figure 1 It is a schematic external perspective view of a droplet application device 30 as a film forming device.

[0048] The droplet application device 30 has a base 32, a first moving unit 34, a second moving unit 16, an electronic balance (weight measurement unit) not shown in the figure, a droplet discharge head 20, a capping unit 22, and a cleaning unit 24. Wait. The first moving unit 34 , the electronic balance, the capping unit 22 , the cleaning unit 24 and the second moving unit 16 are all installed on the base 32 .

[0049]The first moving unit 34 is preferably provided directly on the base 32, and the position of the first moving unit 34 is determined on the Y axis. On the other hand, the second mobile unit 16 is installed standingly on the base 32 using the pillars 16A, 16A, and the second mobile unit 16 is attached to the rear portion 32A of the b...

Embodiment approach 2

[0080] In the first embodiment described above, the case of vibrating two kinds of liquid droplets 99a and 99b having different sizes at a constant frequency was described, but in the present embodiment, the case of vibrating by changing the frequency will be described.

[0081] As shown in FIG. 8( a ), in this embodiment, liquid droplets 99 a to 99 c of three types of sizes (diameter 99 a > > 99 b > 99 c ) are coated on the substrate 2 . The control device 25 controls the driving of the piezoelectric elements 34-38, 71-73, including the natural vibration frequencies (resonant frequencies) fa, fb, fc corresponding to the sizes of the droplets 99a-99c respectively (knowing that fa< In the range of fb

[0082] At this time, the control device 25 changes (sweeps) the frequency from high to low. In this case, first, the droplet 99c with the highest resonance frequency strongly vibrates (resonates), as shown in FIG. 8(b), f...

Embodiment approach 3

[0086] In Embodiment 3, a case where a linear film is formed by vibration will be described.

[0087] In the present embodiment, for example, as shown in FIG. 9( a), large-diameter droplet groups (first liquid droplets) are coated with various sizes (at least adjacent droplet sizes are different) along the X-axis direction (first direction). droplet group) 97a, on both sides of the Y direction that clamp the droplet group 97a, droplet groups with small diameters are applied in various sizes (at least adjacent droplet sizes are different) along the Y-axis direction (second direction). (Second droplet group) 97b.

[0088] The size of droplet group 97a is selected from a predetermined range (first range) and applied, and the size of droplet group 97b is selected and applied from a range different from that of droplet group 97a (second range).

[0089] In addition, the sizes of at least adjacent droplets in the droplet groups 97a and 97b are different, but in FIG. 9( a ), for con...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

Exemplary embodiments easily form a planar thin film having a uniform film thickness. A plurality of droplets are applied to the substrate to manufacture a film. The film forming method includes applying the droplets to the substrate in a plurality of sizes, and vibrating the droplets on the substrate with vibration properties different from each other.

Description

technical field [0001] The present invention relates to a film-making method, a film-making device, an equipment manufacturing method, an equipment manufacturing device and equipment, and an electronic device. Background technique [0002] Along with the development of electronic equipment such as computers or portable information terminals, the use of liquid crystal display devices, especially color liquid crystal display devices, has been increasing. Such a liquid crystal display device employs a color filter for colorizing a displayed image. There is a substrate in the color filter, and R (red), G (green), and B (blue) inks (droplets) are sprayed onto the substrate in a given pattern, and the ink is dried on the substrate to form a colored layer . As a coating method for ejecting ink onto such a substrate, for example, an inkjet method (droplet discharge method) drawing device is used. [0003] In the case of using the inkjet method, a predetermined amount of ink is ej...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20B05C5/00B05D3/12B05D7/00B32B37/24B41J2/01G02F1/1335
CPCB32B2037/243B32B2310/028B32B37/24Y10T428/31504B05D3/12B41J2/01
Inventor 三浦弘纲
Owner SEIKO EPSON CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap