System and method for testing three-dimensional motion of microstructure by image matching and phase shift interference

A technology of three-dimensional motion and phase-shift interference, which is applied to measurement devices, optical devices, instruments, etc., can solve problems such as difficulty in three-dimensional topography, inability to extract plane motion parameters of image edge information, and inability to obtain three-dimensional topography. The effect of the test
CN1654923AInactive Publication Date: 2005-08-17TIANJIN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TIANJIN UNIV
Publication Date
2005-08-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention discloses a system and a method for testing microstructure 3-D motion with image-match and phase shift interference. The system includes an optical microscope, a Mirau interference object glass, its vertical position controller, a strobe lighting driving device, a CCD camera, image collecting cards, a numeric computer and a motion excitation driver, among which, the strobe lighting device drives LEDS of white light and monochromatic light to irradiate the micro structure, which tests the plane motion parameter in white light LED irradiation and tests its out-of -plane motion parameter in monochromatic light LED irradiation. The method includes synchronous control to strobe and drive signals, extraction of plane motion parameter in white light irradiation, set up a relative coordinate system, the obtaining of the surface shape and the extraction coordinate system.
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Description

technical field

[0001] The invention relates to a method and system for testing three-dimensional motion parameters of microstructures in microelectromechanical systems (MEMS) using image matching and phase shifting interference techniques comprehensively. It belongs to the mechanical quantity measurement technology of the photoelectric non-contact method for micro-electromechanical systems. Background technique

[0002] Micro-Electro-Mechanical Systems (MEMS) is developed on the basis of microelectronics technology. It is an integrated device or system composed of electronic and mechanical components. It is manufactured by a mass-processing process compatible with integrated circuits. At the same time, computing, sensing and execution are integrated, thus changing the way of perceiving and controlling the natural world. Most of the manufacturing processes of microelectromechanical systems (MEMS) are compatible with the processing technol...

Claims

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