Integral probe card and assembling mode

Abstract

An integrated probe card and the assembly way, it mainly contains, many probes; a electric circuit space switch, with multi-line, and on the two faces the surface, forms the contact separately which leads with this line passes, and the probe on end surface, An elastic electric circuit communication junction panel. Contains board and many elasticities; several chambers on top and bottom formed in the boards, this various elasticities in each chamber separately. A leveling mechanism. The probe, circuit space switch, elastic circuit connection board and the circuit board are fixed by the leveling mechanism.

Description

technical field [0001] The present invention relates to a probe card, specifically an integrated probe card and its assembly method. Background technique [0002] According to the various types of probe cards currently commonly used in the semiconductor industry, such as U.S. Patent No. 4,027,935, No. 4,754,256, No. 5,090,118, No. 5,475,318, and No. 6,072,190... etc., although the structures of the above-mentioned various probe cards , action principles and manufacturing methods are not the same, but they all have a number of shortcomings. For example, in traditional probe cards, the types of probes can be divided into cantilever type (such as epoxy ring probe card) and cantilever type. There are two types of vertical type (vertical type, such as cobra probe card). These two types of probe card types all fix their probes (tungsten needles, lead needles or copper needles) on the printed circuit board ( On the PCB), the height of the probe is also gradually adjusted manually....

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