Swinging electromagnetic micro-electromechanical system relay

Abstract

This invention relates to a rocking electromagnetic micro-relay in the field of electric component technology. It includes: the rotor permanent magnet sheet, the shaft, the rotor soft magnet sheet, the stator winding, the cantilever, the shell, the contactor, the cover, the open, the location pin, the lead node, the feed contactor. The rotor soft magnet sheet is the substrate of the rotor permanent magnet sheet, and the two magnet sheets superposes together and form the rotor, the rotor and the stator winding are connected through the shaft. Set electromagnetic micro-motor with superposition structure in the shell, the contactor on the top of the cantilever, the open in the middle of the cover, the two location pins at the two ends of the open, the lead node and the feed contactor on the external sides of the two location pins. This invention makes use that the magnetic rotor wheels to and for in the plane of the stator to control the mechanic contactor to switch on and off the circuit, and changes the die damp of the cantilever into slip damp, and effectively improve the response performance of the micro-relay in the atmosphere environment.

Description

technical field [0001] The invention relates to a relay in the technical field of electrical components, in particular to a swing electromagnetic micro-electro-mechanical system relay. Background technique [0002] Compared with traditional electromechanical relays, MEMS (micro-electromechanical systems) relays have the characteristics of small size, low power consumption, fast response, high isolation, and strong load capacity, and can eventually achieve integrated manufacturing similar to semiconductor technology, so they are valued. A variety of MEMS relays based on different driving principles have been successfully developed in the laboratory, and have shown good expected characteristics and attractive practical prospects, among which electrostatic and electromagnetic drive MEMS relays are the most representative. [0003] Found through literature retrieval to prior art, in " sensor and actuator ", in A91 (2001) 346-350 " locking type micro-electromagnetic relay " artic...

AI Technical Summary

Problems solved by technology

However, when the distance between the cantilever beam and the substrate (counter electrode) is small enough, the film damping will significantly restrict its motion characteristics, and the response speed in the atmospheric environment will be greatly limited, and vacuum packaging is well known Therefore, MEMS relays with simple cantilever beam structures are facing challenges, and the design of micro-mechanical relays with various novel structures has been continuously proposed

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