High-frequency sound surface wave device emtal alloy film with electromigration-resistance
A high-frequency surface acoustic wave, metal alloy technology, applied in electrical components, impedance networks, etc., can solve problems such as limitations, etching difficulties, rough graphic interface, etc., to achieve the effect of improving accuracy, adhesion and power tolerance
Active Publication Date: 2005-10-26
TSINGHUA UNIV
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, alloy films containing Cu W have limitations in reactive ion etching
Mainly manifested as difficult etching, rough etched graphic interface, etc.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment
[0007] Example: On SiO 2 , LiNbO 3 or LiTaO 3 All three kinds of piezoelectric substrates use alloy film composition as Mo: 0.6wt%, Co: 1wt%, the rest is Al; Mo: 2wt%, Co: 0.1wt%, the rest is Al and Mo: 1wt%, Co: 1wt% %, and the rest is Al to make high-frequency surface acoustic wave devices. After testing, its film has better anti-electromigration ability in high-frequency surface acoustic wave devices, and the adhesion and power bearing capacity of the film are improved. The alloy composition is Mo: 0.6wt%, Co: 1wt%, and the rest is Al. The nano-scratch test shows that the critical load is about double that of the pure Al film, indicating that the adhesion of the alloy film is greatly increased.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
This invention discloses a high frequency sound surface wave device metallic alloy film with dielectric migration, which is Al-Co-Mo alloy film with Mo 0.1-2wt%, Co 0.1-2wt% and Al for the rest deposited on a piezoelectric matrix by the way of physical gas-phase deposition, used in high power and high frequency sound surface wave device to increase the adhesive force and power bearing free of films in the high frequency sound surface wave devices.
Description
technical field [0001] The invention belongs to the manufacturing technology of surface acoustic wave devices, in particular to a metal alloy thin film of high-frequency surface acoustic wave devices with anti-electromigration. Background technique [0002] Surface acoustic wave (SAW) filters are widely used in modern communication systems. In the manufacturing process of SAW devices, the conversion of electrical signals and acoustic signals is completed by interdigital transducers. Aluminum has high electrical conductivity, low acoustic impedance, stable chemical properties, and easy deposition, so it is widely used as a material for interdigital transducers. For a SAW filter with a working frequency of GHz, the width of the fingers of the interdigital transducer is generally on the order of microns or nanometers. Such a fine electrode requires strong power and mechanical endurance, because Al has a high self-diffusion coefficient, Repeated stress from surface acoustic wa...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/08
Inventor 潘峰李冬梅曾飞王旭波
Owner TSINGHUA UNIV