Method for preparing nano zinc oxide tube by assistance of radiofrequency plasma
A radio frequency plasma, zinc oxide nanotube technology, applied in zinc oxide/zinc hydroxide, nanotechnology, nanotechnology and other directions, can solve the problem of not finding ZnO nanotubes, and achieve the effect of avoiding interference
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Embodiment 1
[0016] Embodiment 1 Growth of ZnO nanotubes on a sapphire substrate
[0017] When growing ZnO nanotubes, the cleaned sapphire Al 2 o 3 The substrate is glued to the surface of the molybdenum holder with high-purity indium and placed on the sample holder. Use a mechanical pump, a molecular pump, and an ion pump to evacuate the backside of the growth chamber to 10 -7 Below Pa, the chemically treated sapphire substrate (Al 2 o 3 ) to 750°C to degas for 30 minutes. The vapor pressure of the Zn source is 4×10 -4 Pa, oxygen partial pressure is 6×10 -3 Pa, substrate temperature Treat the substrate surface with a plasma power of 300W at 550°C for 30 minutes to obtain a fresh surface. After opening the ion trap to grow ZnO with a thickness of 5nm, turn off the Zn source and the ion trap, treat the ZnO with plasma for 30 minutes, and then turn on the EIT to grow ZnO for 2 hours.
[0018] Utilizing the invention, high-quality ZnO nanotubes are prepared on the sapphire substrate. ...
Embodiment 2
[0019] Embodiment 2 Growth of ZnO nanotubes on a silicon substrate
[0020] Use mechanical pumps, molecular pumps and ion pumps to vacuum the back of the growth chamber to less than 10 -7 Pa, the chemically treated silicon substrate (Si) was heated to 750° C. to degas for 40 minutes. The vapor pressure of the Zn source is 5×10 -4 Pa, the substrate temperature is 550°C, after opening the ion trap to grow ZnO with a thickness of 5nm, turn off the Zn source and ion trap, treat ZnO with plasma for 30 minutes, and then turn on EIT to grow ZnO for 2 hours.
[0021] The invention realizes the growth of ZnO nanotubes on the silicon (111) substrate. In the XRD diffraction spectrum, only the (001) diffraction peak can be observed. The high-resolution field emission microscope shows that the obtained nanotubes grow preferentially vertically, the angle between the growth direction and the normal direction of the silicon substrate is ±30°, and the angle is 100 nanometers, and the outer ...
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