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Container for clean room

A container and clean room technology, applied in semiconductor/solid-state device manufacturing, electrical components, packaging, etc., can solve problems such as odor, clean room pollution, and non-use of ABS

Inactive Publication Date: 2005-12-21
FUJI BAKELITE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, ABS or resins similar to it are rarely used as materials for current clean room containers in order to avoid possible sources of contamination.
[0011] Japanese Patent Laying-Open No. 9-59462 discloses ABS resin with less residual organic matter, but it is only aimed at the odor problem of the casing of home appliances and vehicle molded products, not to solve the pollution source problem in the clean room

Method used

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  • Container for clean room

Examples

Experimental program
Comparison scheme
Effect test

Synthetic example 1

[0064] 50 parts (solid content) of polybutadiene latex (weight average particle diameter 0.30 μm, gel content 85%), 150 parts of water, 0.1 part of disodium ethylenediaminetetraacetic acid were charged into the polymerization reactor after nitrogen substitution Salt, 0.001 parts of iron sulfate, 0.3 parts of sodium formaldehyde sulfoxylate, after heating to 60 ° C, continuously add 3 parts of acrylonitrile, 12 parts of styrene, 35 parts of methyl methacrylate and 0.2 parts of hydroperoxide for 3 hours. The mixture of cumene was further polymerized at 60° C. for 2 hours to obtain a graft copolymer latex. Afterwards, relative to 100 parts by weight (solid content) of this latex, use 3.0 parts by weight of magnesium sulfate as a salting out agent to carry out salting out, then add 1.5 times the volume of water of the graft copolymer resin particles and stir, dehydration washing, and then drying, Graft-copolymerized resin particles (1) were obtained.

Synthetic example 2

[0066] In Synthesis Example 1, graft copolymer resin particles were obtained in the same manner as in Synthesis Example 1, except for performing steam distillation after polymerization and changing the coagulation and washing steps. That is, steam was blown into the graft copolymer latex obtained after polymerization, and steam distillation was performed for 1 hour. At this time, the latex temperature was 80°C. After steam distillation, use 1.0 parts by weight of sulfuric acid to coagulate as a coagulant, then add 2.5 times the volume of water of the graft copolymer resin particles to stir, dehydrate, repeat the washing operation 3 times, except the above points, and synthesize In Example 1, graft copolymer resin particles (2) were obtained in the same manner.

Synthetic example 3

[0068] 130 parts of pure water and 0.3 parts of potassium persulfate were charged into the polymerization reactor after nitrogen substitution, and the temperature was raised to 65° C. while stirring. Then spend 4 hours to continuously add a mixed monomer solution containing 10 parts of acrylonitrile, 30 parts of styrene, 60 parts of methyl methacrylate and 0.35 parts of tert-dodecyl mercaptan, and 30 parts of 2 parts of disproportionated rosinic acid Potassium emulsifier aqueous solution. Thereafter, the temperature of the polymerization system was raised to 70° C., and aging was performed for 2 hours to obtain a styrene-based polymer latex. After that, with respect to 100 parts by weight (solid content) of this latex, use 2.5 parts by weight of magnesium sulfate as a salting out agent to carry out salting out, then add 1.5 times the volume of water of the styrene-based polymer and stir, dehydration washing, and then drying, Styrenic polymer (3) was obtained.

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Abstract

A container for a clean room made of a thermoplastic resin having an ash content of 0.2% by weight or less, wherein the thermoplastic resin is a diene-based rubber particle formed by polymerization of a diene monomer as a main component and dispersed in a base resin The base resin contains a copolymer formed from an aromatic vinyl monomer and other monomers copolymerizable therewith. Preferably, it is a container capable of loading a plate-shaped object selected from a semiconductor substrate, a display substrate, and a recording medium substrate. Accordingly, it is possible to provide a container for a clean room that contains ABS or a resin similar thereto, has a small ash content, and is less likely to become a source of metal contamination.

Description

technical field [0001] The present invention relates to containers for clean rooms. More specifically, the present invention relates to a container for a clean room made of a thermoplastic resin, wherein the thermoplastic resin is a diolefin polymerized as a main component of a diene monomer, and the ash content of the thermoplastic resin is 0.2% by weight or less. The ethylenic rubber particles are dispersed in a matrix resin containing a copolymer of an aromatic vinyl monomer and other monomers that can be copolymerized therewith. Background technique [0002] In order to prevent contamination, silicon wafers in the semiconductor manufacturing process, glass substrates in the liquid crystal panel manufacturing process, and metal disks in the hard disk manufacturing process must be operated in a clean room. In these manufacturing processes, various containers for efficiently transporting these substrates are used. For example, it may be used as a container when loading mu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08L51/04H01L21/673
CPCH01L21/67366C08L51/04
Inventor 坂本贵树近内则行白发准田伏浩一高桥和则荘司博敏
Owner FUJI BAKELITE