Nano grade positioning precision one dimension displacement work table

Abstract

The one-dimensional displacement work table in nanometer level positioning precision includes a work table part, a position detecting part, and a driving part. The work table part includes coarse regulating work table, which is set between rolling tracks in vertical direction and has coarse displacement regulating mechanism; and fine regulating work table, which has pedestal set in the inner cavity of the coarse regulating work table via one connecting foldable flexible hinge support mechanism and has piezoelectric micro displacement unit as fine displacement regulating mechanism set between its pedestal and the coarse regulating work table. The driving part for the coarse regulating work table and the fine regulating work table is connected to the signal processing and controlling circuit. diffraction grating fixed on the work table is used as the measurement sensor for the displacement of the work table to form the displacement relevant detection signal.

Description

technical field [0001] The invention relates to a one-dimensional displacement workbench with nanometer-level positioning accuracy, specifically, a one-dimensional displacement workbench, which can realize a wide range in the vertical direction and ultra-precise displacement positioning, and is used in microelectronic engineering , Metrology Science and Technology, Optics and Optoelectronics Engineering, Precision Engineering, Bioengineering, Nano Science and Technology and other scientific and technological fields. Background technique [0002] The development of scientific and technological fields such as microelectronics engineering, metrology science and technology, optics and optoelectronics engineering, precision engineering, bioengineering, nanoscience and technology has put forward higher and higher requirements for precise positioning. Existing precision displacement tables generally suffer from low precision and slow positioning speed due to their large working ran...

AI Technical Summary

Problems solved by technology

Existing precision displacement tables generally suffer from low precision and slow positioning speed due to their large working range (see L.Juhas, A.Vuianic, N.Adamovic, L.Nagy, B.Borovac, Aplatform for micro-positioning based on piezo legs, Mechatronics2001, 11: 869-897), while the problem of high positioning accuracy and fast speed results in a small working range (see Awabdy BA, Shih WC, Auslander DM, Nanometer positioning of a linearmotion stage under static loads, IEEE Trans Mechatronics, 1998: 3 (2): 113-9). In addition, most of the existing long-stroke and nanoscale workbench measurement feedback systems use dual-frequency laser interferometry systems. More than mm, the installation is difficult to comply with the Abbe principle, and the cost is high

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