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Precision vibration damping and locating device

A positioning device and precise technology, applied in non-rotational vibration suppression, electrical components, semiconductor/solid-state device manufacturing, etc., to achieve precise position positioning, high repeat positioning accuracy, and small device deformation.

Inactive Publication Date: 2006-01-25
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a precision vibration reduction and positioning device, which solves the technical defects of using a single active vibration reduction system or passive vibration reduction system, and realizes effective vibration reduction and multi-degree-of-freedom positioning

Method used

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  • Precision vibration damping and locating device

Examples

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Embodiment Construction

[0027] A preferred embodiment is given below in conjunction with the accompanying drawings to further describe the present invention.

[0028] Such as figure 1 As shown: the entire damping device consists of passive damping components and active damping actuators. The passive damping component is mainly a cavity structure, which can have a certain range of motion in the horizontal and vertical directions. The cavity 8 can be composed of gas, Rubber, metal rubber or liquid filled7. If the filling medium is liquid or gas, the cavity 8 needs to be sealed, and the low-frequency resonance frequency of the system is controlled by the solenoid valve 14 to realize active control. Connected to the vibration damping platform 13 through the piston mechanism supported by these filling carriers, the vibration source is firstly isolated or attenuated to a greater extent in a wider frequency band; there is an active vibration damping component and a passive vibration damping component The ...

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Abstract

The invention relates to an effectively damping multi-freedom locating device with the passive control as the principal and the active control as the auxiliary, used to realize accurate horizontal and height location, and comprising passive damping component and active damping component, where the passive damping component is of a cavity structure able to have a certain horizontal and vertical moving range and is connected through the cavity-supported piston mechanism to a damped platform for isolating or attenuating the vibrating source in a wider frequency band by a large margin; an active control component joins the damped vibrating components, and is composed of vibration sensor, signal processor, data collector, operation policy maker, electric machine driver, and two linear electric machines in the vertical and horizontal directions, so as to make accuracy location. The invention has compact structure, high reliability, high repeated locating accuracy, strong adaptability, small device deformation, moving stability and meets the strict requirements of the precision devices, such as photo-etcher, etc. at normal temperature.

Description

technical field [0001] The invention relates to a vibration reduction and positioning device, in particular to an effective vibration reduction and multi-degree-of-freedom positioning device mainly based on passive and supplemented by active control, which is used to realize precise positioning of horizontal and height. Background technique [0002] In the semiconductor industry, electromechanical systems need to achieve microscopic (micron or nanometer) positioning accuracy requirements, and all external environment and ground vibrations and other aspects of interference cannot be ignored. Therefore, it is necessary to place the workbench / equipment used to realize the production function on a vibration isolation system free from external interference. The strength of the vibration isolation system's ability to suppress the interference of the external environment is the key to whether semiconductor equipment and other high-precision equipment can realize their functions and...

Claims

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Application Information

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IPC IPC(8): F16F15/03H01L21/68
Inventor 严天宏蔡良斌张国韦
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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