Precision vibration damping and locating device
A positioning device and precise technology, applied in non-rotational vibration suppression, electrical components, semiconductor/solid-state device manufacturing, etc., to achieve precise position positioning, high repeat positioning accuracy, and small device deformation.
Inactive Publication Date: 2006-01-25
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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The invention relates to an effectively damping multi-freedom locating device with the passive control as the principal and the active control as the auxiliary, used to realize accurate horizontal and height location, and comprising passive damping component and active damping component, where the passive damping component is of a cavity structure able to have a certain horizontal and vertical moving range and is connected through the cavity-supported piston mechanism to a damped platform for isolating or attenuating the vibrating source in a wider frequency band by a large margin; an active control component joins the damped vibrating components, and is composed of vibration sensor, signal processor, data collector, operation policy maker, electric machine driver, and two linear electric machines in the vertical and horizontal directions, so as to make accuracy location. The invention has compact structure, high reliability, high repeated locating accuracy, strong adaptability, small device deformation, moving stability and meets the strict requirements of the precision devices, such as photo-etcher, etc. at normal temperature.
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