Precision vibration damping and locating device
A positioning device and precise technology, applied in non-rotational vibration suppression, electrical components, semiconductor/solid-state device manufacturing, etc., to achieve precise position positioning, high repeat positioning accuracy, and small device deformation.
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[0027] A preferred embodiment is given below in conjunction with the drawings to further describe the present invention.
[0028] Such as figure 1 Shown: the entire damping device includes passive damping components and active damping executive components. The passive damping component is mainly a cavity structure, which can have a certain range of movement in both horizontal and vertical directions. The cavity 8 can be made of gas, Rubber, metal rubber or liquid filling 7. If the filled medium is liquid or gas, the cavity 8 needs to be sealed, and the solenoid valve 14 is used to realize active control to control the low-frequency resonance frequency of the system. The piston mechanism supported by these filling carriers is connected to the vibration damping platform 13, and the vibration source is first isolated or attenuated in a relatively wide frequency band; there is an active part between the damped component and the passive damping component. The control components are co...
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