Nanometer structure micro mechanical biochemical sensor

A technology of biochemical sensors and nanostructures, applied in instruments, analytical materials, fuel oil testing, etc., can solve the problems of low sensitivity, slow adsorption rate, poor accuracy, etc., and achieve the effect of improving sensitivity and accuracy

Inactive Publication Date: 2006-06-28
TSINGHUA UNIV
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Problems solved by technology

[0004] The disadvantage of the existing micro-mechanical structure sensors for detecting explosives is that the material used to make the micro-mechanical structure has a very slow adsorpt

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  • Nanometer structure micro mechanical biochemical sensor
  • Nanometer structure micro mechanical biochemical sensor
  • Nanometer structure micro mechanical biochemical sensor

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[0015] The invention provides a nanostructured micromechanical biochemical sensor with high sensitivity and simple structure for detecting multiple gases including explosive gases. The design mechanism of the present invention is that the nanomaterials grown on the micromechanical structure adsorb explosive gases, and the applied pulse voltage rapidly heats the nanomaterials adsorbing explosive gases through a heating resistor, so that the temperature exceeds the explosion of explosives and other molecules. Point, detonate explosive molecules and other gases, the explosion causes the deformation of the micro-mechanical structure, use optical methods, capacitance, piezoelectric or piezoresistive methods to detect the deformation to obtain the output signal of the sensor, and realize the detection of explosive gases. The micromechanical structure can be made of SOI silicon wafers, and the resistance used to heat the nanomaterials and the piezoresistance used to detect the deformatio...

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Abstract

A micromechanical biochemical transducer of nanostructure is prepared as setting micro suspension ¿C arm on SOI silicon base, coating silica insulation layer on said arm with its top layer being heating resistance prepared by single ¿C crystal silicon, coating nanomaterial on heating resistance, connecting nanomaterial heating unit to heating resistance by leading wire, setting laser generator and transducer output signal detection unit of position sensitive detector above micro suspension ¿C arm.

Description

technical field [0001] The invention belongs to the scope of micro-processing technology and micro-detection devices, in particular to a nano-structured micro-structure for detecting various gases including explosive gas and adopting micro-processing technology to grow or deposit nano-materials on a micro-mechanical structure. Mechanochemical sensors. Background technique [0002] Explosive detection is an area that modern science and technology needs to develop urgently. It plays an important role in the fields of national defense and anti-terrorism, especially the detection of explosive gas, which is more and more important because of its difficulty in detection. At present, the sensors used to detect explosives, such as ion mobility spectroscopy, nuclear resonance, etc., but the sensors using the above technologies have some disadvantages such as large size, high cost, and inability to miniaturize; the most important and effective detection method for explosive gases Pol...

Claims

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Application Information

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IPC IPC(8): G01N33/22G01N5/02G01N25/54G01N35/00
Inventor 王喆垚周有铮庄志伟刘理天
Owner TSINGHUA UNIV
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