Piezoelectric resonator frequency adjustment method and piezoelectric resonator

A piezoelectric resonance and frequency adjustment technology, which can be applied to piezoelectric devices/electrostrictive devices, manufacturing/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc. Falling to the bottom, adhesion, easy to cause migration and other problems, to achieve the effect of reducing the frequency difference

Active Publication Date: 2006-06-28
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In such a piezoelectric resonant component with a built-in load capacitor, if the capacitance element and the piezoelectric resonant element are stacked on the case substrate, and the etching frequency is adjusted from above the piezoelectric resonant element

Method used

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  • Piezoelectric resonator frequency adjustment method and piezoelectric resonator
  • Piezoelectric resonator frequency adjustment method and piezoelectric resonator
  • Piezoelectric resonator frequency adjustment method and piezoelectric resonator

Examples

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Example Embodiment

[0038] Hereinafter, specific embodiments of the present invention will be described with reference to the drawings to further clarify the present invention.

[0039] refer to figure 1 and figure 2 , the method for adjusting the frequency of the piezoelectric resonator according to the first embodiment of the present invention will be described. In this embodiment, prepare figure 2 The piezoelectric resonant component shown. That is, the piezoelectric resonance component 1 includes a rectangular plate-shaped case substrate 2 . The case substrate 2 is made of insulating ceramics such as alumina or glass ceramics. In the case substrate 2, electrodes 3 to 5 are formed from the upper surface to a pair of side surfaces and the lower surface. Capacitive element 7 is bonded to electrodes 3 to 5 using conductive adhesives 6a to 6c.

[0040] The capacitive element 7 includes a dielectric substrate 8, and first and second capacitive electrodes 9 and 10 formed on the upper surfac...

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Abstract

A frequency adjustment method of a piezoelectric resonance component. When an energy beam is irradiated from above to etch the electrodes to adjust the frequency, it is difficult to cause a decrease in insulation resistance, short-circuit defects, and migration between electrodes. It has a piezoelectric body (14) with side surfaces (14a, 14b) and an upper surface, and an electrode (15) designed on the piezoelectric body. A piezoelectric resonance member having side surfaces (14a, 14b) as inclined surfaces so that the lower portion is located on the center side of the piezoelectric body (14) than the upper end. A frequency adjustment method in which a shield layer (22) including an opening (22a) is arranged on the upper surface of the piezoelectric resonant member, and the frequency is adjusted by irradiating an ion beam from above.

Description

[0001] technology area [0002] The present invention relates to a method for adjusting the frequency of a piezoelectric resonator and a piezoelectric resonator. More specifically, it relates to processing by reducing the thickness of electrodes by irradiating energy rays such as ion beams, and having a method for realizing the frequency adjustment process. A frequency adjustment method for a piezoelectric resonant component, and a piezoelectric resonant component using the frequency adjustment method. Background technique [0003] Conventionally, various piezoelectric resonant elements have been proposed in order to constitute piezoelectric resonators and piezoelectric oscillators. In these kinds of piezoelectric resonance components, it is necessary to adjust the resonance frequency and the oscillation frequency with high precision according to desired characteristics. [0004] Patent Document 1 below discloses an example of a method of adjusting the frequency of a piezoele...

Claims

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Application Information

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IPC IPC(8): H03H3/04H01L41/09H01L41/187H01L41/22H01L41/253H01L41/29H01L41/311H03H9/02H03H9/10H03H9/17H03H9/58
CPCH03H3/04H03H9/02086H03H9/0514H03H9/0547H03H9/58
Inventor 池田功
Owner MURATA MFG CO LTD
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