Hard coating, target for forming hard coating, and method for forming hard coating

A technology of hard coating and film-forming gas, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., to achieve excellent hardness and lubricity, and prolong service life

Inactive Publication Date: 2006-08-16
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This hard coating is

Method used

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  • Hard coating, target for forming hard coating, and method for forming hard coating
  • Hard coating, target for forming hard coating, and method for forming hard coating
  • Hard coating, target for forming hard coating, and method for forming hard coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0127] The following methods were used to evaluate the physical properties of the hard coatings obtained in the following experimental examples:

[0128] [Composition of Hard Coat]

[0129] Composition was determined using EPMA. In this method, it was also confirmed that the content of impurities other than metal elements and nitrogen, the content of oxygen and the content of carbon did not exceed 5 atomic %, respectively.

[0130] [Conditions used in crystal structure analysis]

[0131] The crystal structure of the hard coat layer was evaluated by performing X-ray diffraction by the θ-2θ method using an X-ray diffractometer manufactured by Rigaku Electric. X-ray diffraction of cubic crystals was performed using a CuKα source, and the peaks of the (111) surface, (200) surface, and (220) surface were measured at about 2θ = 37.78°, about 2θ = 43.9°, and about 2θ = 63.8°, respectively strength. X-ray diffraction of hexagonal crystals was performed using a CuKα source, and the...

experiment Embodiment 1

[0169] [Formation of hard coat layer]

[0170] The target 6 used was a target having a composition shown in Table 1 "Composition Ratio (Atomic Ratio) of Target".

[0171] Chamber 1 was evacuated, and the object was heated to 500°C with a heater (not shown). A single gas or a mixed gas having a composition of "composition ratio (atomic ratio) of film-forming gas" shown in Table 1 was supplied from gas inlet 12 into chamber 1 until the pressure of chamber 1 reached 2.66 Pa. A voltage of 20 to 100V is applied to the target from the bias power supply 4, so that the target W is a negative voltage relative to the ground voltage. Arc discharge was then started by the arc power source 7 to evaporate and ionize the target 6 to deposit a 3 μm hard coat on the surface of the target piece W.

[0172] [Physical Properties of Hard Coat]

[0173] Crystal structure, value of formula (1), hardness, coefficient of friction and wear width were evaluated for the obtained hard coating layer. T...

experiment Embodiment 2

[0178] [Formation of hard coat layer]

[0179] The experiment was performed by repeating the procedure of Experimental Example 1, except that the target 6 used was a target having a composition shown in Table 2 as "composition ratio (atomic ratio) of target".

[0180] [Physical Properties of Hard Coat]

[0181]The crystal structure, value of formula (1), hardness, coefficient of friction, and wear width of the obtained hard coating layer were evaluated. The results are shown in Table 2.

[0182] Target composition ratio

[0183] Compared with conventional coatings comprising TiAlN (Comparative Example 1) and CrAlN (Comparative Example 2), the hard coatings of the present invention (Examples 15 to 33) all have better hardness, lower coefficient of friction and narrower wear width. Hardcoats that also contained Si and B (Examples 16 to 33) had equal or better properties than the inventive hardcoats that did not contain Si or B (Example 15). However, coatings outs...

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Abstract

The present invention attempts to provide a hard coating which has excellent hardness and lubricity. Such attempt has been completed by providing a hard coating comprising (Al(1-a)Va) (C(1-X)NX), wherein 0.27 <= a <= 0.75, and 0.3 <= X <= 1, a and X respectively represent atom tatio.

Description

technical field [0001] The present invention relates to a hard coating for use in cutting tools such as shovels, drills and end mills, forging dies and fixtures, and tools such as blanking dies; a target for forming such a coating; and a A method of depositing a hard coating. Background technique [0002] Cutting tools have wear resistance by forming hard coatings of TiN, TiCN, TiAlN, etc. on substrates such as high-speed steel, cemented carbide, and cermets. In particular, TiAlN is an advantageous choice in the case of forming a hard coating on a high speed cutting tool or a hardened cutting tool such as hardened steel. With recent increases in hardness of materials cut by cutting tools and increases in cutting speed, a hard coating with improved wear resistance is highly demanded. For example, JP-A No. 2003-71610 discloses the use of TiCrAlN instead of TiAlN to increase the proportion of AlN having a rock-salt structure in the coating, thereby increasing the hardness of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/22
Inventor 山本兼司
Owner KOBE STEEL LTD
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