Multi-parameter sensor for measuring differential pressure/pressure/temp

A differential pressure sensor and temperature measurement technology, which is applied to the pressure difference measurement between multiple valves, the fluid pressure measurement of the elastic deformation gauge, the fluid pressure measurement using the capacitance change, etc., which can solve the difficult detection of various parameters, etc. problem, to achieve the effect of light weight, easy manufacture, and good development space

Active Publication Date: 2006-11-29
SHANGHAI AUTOMATION INSTRAION CO LTD
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Problems solved by technology

[0003] The purpose of the present invention is to provide a multi-parameter sensor for differential pressure/pressure/temperature measurement to solve the problem that the e

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  • Multi-parameter sensor for measuring differential pressure/pressure/temp

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Embodiment Construction

[0017] A multi-parameter sensor for differential pressure / pressure / temperature measurement, as shown in Figure 1, is characterized in that a differential capacitance bellows-type differential pressure sensor 41 for detecting differential pressure signals is packaged in a housing 36; The piezoresistive static pressure sensor 7 for the static pressure signal and the high-precision integrated temperature measurement chip 31 for the digital output of the sensor itself and the temperature of the medium in contact with it. The three sensors are used to detect various parameters of differential pressure / pressure / temperature . The above-mentioned differential capacitance capsule-type differential pressure sensor is placed in the lower circular cavity of the housing 36, which consists of two circular metal bases 14, 28 and a circular elastic metal pressure-sensitive diaphragm 19 The welding ring (welding seam) 21 formed by welding at its periphery is connected together, and a ceramic c...

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Abstract

The invention discloses a multi-parameter sensor for measuring differential pressure/pressure/temperature, characterized in that there is a differential capacitance bellows differential pressure sensor packed combination in a casing; pressure resistance type static pressure sensor, detecting sensor and medium temperature digital output high-accuracy integrated temperature sensing chip are used to detect differential pressure, pressure, and temperature parameters. And it has characters of small and exquisite, lightweight, and easy to manufacture by routine process. On this basis, various manufactured transducers of different functions can be widely applied to chemical departments, petroleum departments, metallurgy departments, power stations, etc, for detecting pressure, level, differential pressure, flow and other basic thermal parameters of liquid, gas and steam, and can posses multiple compensating properties and very good development space.

Description

technical field [0001] The invention relates to a high-precision integrated temperature measurement chip that uses the principle of capacitance change to detect differential pressure (first pressure) signal, uses piezoresistive strain principle to detect static pressure (second pressure) signal, and uses digital output The utility model relates to a multi-parameter sensor for measuring differential pressure / pressure / temperature to detect the temperature of the sensor itself and the medium in contact with it, belonging to the field of automatic instrument sensors. Background technique [0002] The measurement function of conventional sensors is relatively single, generally in the form of pure pressure, pure temperature, pure differential pressure, etc., and thermistors, semiconductor diodes, etc. can also be installed around the above sensors as temperature detection elements for temperature compensation of the sensor. The disadvantage is that the accura...

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Application Information

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IPC IPC(8): G01D21/02G01L7/10G01L9/12G01L9/06G01L19/04G01L19/06G01L13/02G01L13/06G01K7/00
Inventor 田泉林
Owner SHANGHAI AUTOMATION INSTRAION CO LTD
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