Hartman wave front sensor to realize alignment function by light splitter and testing method thereof

A spectroscopic device and sensor technology, which is applied in the field of precision instruments and Hartmann wavefront sensors, can solve problems such as the deviation of the measured beam from the optical axis of the system, the increase in the error of wave surface measurement, and the difficulty of adjusting the incident wave front, etc. The effects of measurement accuracy, reduced requirements, and small detection errors
CN1963432AInactive Publication Date: 2007-05-16INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2007-05-16
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention relates to one Hageman wave sensor and its test method to realize calibration function, which adds rough and accurate calibration parts in traditional system, wherein, the rough part comprises the image screen with holes, split parts, rough calibration detection system and accurate calibration part comprises focus lens, accurate calibration split lens and detection system. After incidence beam through rough and accurate calibration steps, it rapidly enters micro lens measurement field to improve Hageman system measurement accuracy.
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Description

technical field

[0001] The invention relates to a Hartmann wavefront sensor, a precision instrument for measuring the shape of the wavefront, in particular to a Hartmann sensor that can simply, quickly and accurately adjust the self-collimated beam or the measured beam to enter the measurement field of view. wavefront sensor. Background technique

[0002] The Hartmann wavefront sensor is an instrument that can detect the wavefront shape, and it has been widely used in optical mirror detection, medical instruments and celestial object imaging. In the previous Hartmann wavefront sensor, it usually only includes a measurement light source system, a beam matching system, a microlens array, a photodetector (usually a CCD) and a data processing system. Before the Hartmann wavefront sensor is used, the measured wavefront must be adjusted within the measurement field of view of the microlens array; in the past, the adjustment was made by observing the spot position in the sub-apert...

Claims

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