Hartmann wavefront sensor with active alignment function and detection method therefor

An active sensor technology, applied in the field of precision instruments, can solve problems such as deviation between the measured beam and the optical axis of the system, large wave front measurement error, and difficulty in adjusting the incident wave front, so as to improve measurement accuracy, reduce requirements, and detect small error effect
CN1971232AInactive Publication Date: 2007-05-30INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2007-05-30
Estimated Expiration
Not applicable · inactive patent

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Abstract

The Hartman wave front sensor with active aligning function and its detecting method are disclosed, two parts of rough alignment and accurate alignment are added to the original system, the part of rough aligning includes: aligning light source, imaging screen with holes, moving reflecting mirror, detecting system; the part of accurate alignment includes: focusing lens, beam splitter, detecting system. The aligning light source system could align the workpiece to be detected and the light axis of Hartman system quickly, the incident beam enter the measuring visual field of the lens array to improve the measurement accuracy of Hartman system; the positive lens, negative lens, convex mirror, cancave mirror and flat mirror could be detected easily by the Hartman wave front sensor. The invention can display the adjusting result timely, it has audio-visual and understandable characters to reduce the requirements for users and decrease the adjusting time; the components used in the invention have low requirement for specification and cheap price, it's easy to buy.
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Description

technical field

[0001] The invention relates to a precision instrument for measuring wavefront shape-Hartmann wavefront sensor and its detection method, in particular to a simple, quick and precise adjustment of self-collimated beam or measured beam into the measurement field of view The Hartmann wavefront sensor. Background technique

[0002] The Hartmann wavefront sensor is an instrument that can detect the wavefront shape, and it has been widely used in optical mirror detection, medical instruments and celestial object imaging. In the previous Hartmann wavefront sensor, it usually only includes a measurement light source system, a beam matching system, a microlens array, a photodetector (usually a CCD) and a data processing system. Before the Hartmann wavefront sensor is used, the measured wavefront must be adjusted within the measurement field of view of the microlens array; in the past, the adjustment was made by observing the spot position in the sub-aperture. Compar...

Claims

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