Hartmann wavefront sensor with active alignment function and detection method therefor

An active sensor technology, applied in the field of precision instruments, can solve problems such as deviation between the measured beam and the optical axis of the system, large wave front measurement error, and difficulty in adjusting the incident wave front, so as to improve measurement accuracy, reduce requirements, and detect small error effect

Inactive Publication Date: 2007-05-30
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

Compared with the incident light path, the measurement field of view of the microlens array is usually very small, and the light spot in the sub-aperture will shift greatly when the measured object changes a small angle, so it is difficult to adjust the incident wavefront into the micro Measuring Field of View of Lens Array
Therefore, in the process of using the Hartmann wavefront sensor, too much energy is spent on alignment; and it is easy to cause the measured beam to deviate from the optical axis of the system, resulting in a larger measurement error of the wavefront

Method used

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  • Hartmann wavefront sensor with active alignment function and detection method therefor
  • Hartmann wavefront sensor with active alignment function and detection method therefor
  • Hartmann wavefront sensor with active alignment function and detection method therefor

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Embodiment Construction

[0017] When the Hartmann wavefront sensor is working, the error of the system itself needs to be calibrated first.

[0018] As shown in Figure 1, when calibrating the system error, the light beam emitted by the measurement light source system 6 first passes through the beam splitter 3, then passes through the beam matching system, and finally exits the system. After being reflected by the standard plane mirror 7, it returns to the system, passes through the beam matching system, the beam splitter 3, and the microlens array 4, and forms an image on the photodetector 5, adjusts the position of the standard plane mirror 7, and finally makes the light spots on the photodetector 5 align The cloth meets the measurement requirements, but the area of ​​the microlens array 4 is about 1cm 2 , is very small compared to the overall optical path, resulting in a small adjustable range of the standard plane mirror 7, and the adjustment is very difficult. After being calibrated with the stan...

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Abstract

The Hartman wave front sensor with active aligning function and its detecting method are disclosed, two parts of rough alignment and accurate alignment are added to the original system, the part of rough aligning includes: aligning light source, imaging screen with holes, moving reflecting mirror, detecting system; the part of accurate alignment includes: focusing lens, beam splitter, detecting system. The aligning light source system could align the workpiece to be detected and the light axis of Hartman system quickly, the incident beam enter the measuring visual field of the lens array to improve the measurement accuracy of Hartman system; the positive lens, negative lens, convex mirror, cancave mirror and flat mirror could be detected easily by the Hartman wave front sensor. The invention can display the adjusting result timely, it has audio-visual and understandable characters to reduce the requirements for users and decrease the adjusting time; the components used in the invention have low requirement for specification and cheap price, it's easy to buy.

Description

technical field [0001] The invention relates to a precision instrument for measuring wavefront shape-Hartmann wavefront sensor and its detection method, in particular to a simple, quick and precise adjustment of self-collimated beam or measured beam into the measurement field of view The Hartmann wavefront sensor. Background technique [0002] The Hartmann wavefront sensor is an instrument that can detect the wavefront shape, and it has been widely used in optical mirror detection, medical instruments and celestial object imaging. In the previous Hartmann wavefront sensor, it usually only includes a measurement light source system, a beam matching system, a microlens array, a photodetector (usually a CCD) and a data processing system. Before the Hartmann wavefront sensor is used, the measured wavefront must be adjusted within the measurement field of view of the microlens array; in the past, the adjustment was made by observing the spot position in the sub-aperture. Compar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00G01M11/02G01M19/00G01J9/00G01B11/00G02B27/00G01M99/00
Inventor 李华强饶学军姜文汉鲜浩杨泽平饶长辉
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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