Hartmann wavefront sensor with active alignment function and detection method therefor

Abstract

The Hartman wave front sensor with active aligning function and its detecting method are disclosed, two parts of rough alignment and accurate alignment are added to the original system, the part of rough aligning includes: aligning light source, imaging screen with holes, moving reflecting mirror, detecting system; the part of accurate alignment includes: focusing lens, beam splitter, detecting system. The aligning light source system could align the workpiece to be detected and the light axis of Hartman system quickly, the incident beam enter the measuring visual field of the lens array to improve the measurement accuracy of Hartman system; the positive lens, negative lens, convex mirror, cancave mirror and flat mirror could be detected easily by the Hartman wave front sensor. The invention can display the adjusting result timely, it has audio-visual and understandable characters to reduce the requirements for users and decrease the adjusting time; the components used in the invention have low requirement for specification and cheap price, it's easy to buy.

Description

technical field [0001] The invention relates to a precision instrument for measuring wavefront shape-Hartmann wavefront sensor and its detection method, in particular to a simple, quick and precise adjustment of self-collimated beam or measured beam into the measurement field of view The Hartmann wavefront sensor. Background technique [0002] The Hartmann wavefront sensor is an instrument that can detect the wavefront shape, and it has been widely used in optical mirror detection, medical instruments and celestial object imaging. In the previous Hartmann wavefront sensor, it usually only includes a measurement light source system, a beam matching system, a microlens array, a photodetector (usually a CCD) and a data processing system. Before the Hartmann wavefront sensor is used, the measured wavefront must be adjusted within the measurement field of view of the microlens array; in the past, the adjustment was made by observing the spot position in the sub-aperture. Compar...

AI Technical Summary

Problems solved by technology

Compared with the incident light path, the measurement field of view of the microlens array is usually very small, and the light spot in the sub-aperture will shift greatly when the measured object changes a small angle, so it is difficult to adjust the incident wavefront into the micro Measuring Field of View of Lens Array

Therefore, in the process of using the Hartmann wavefront sensor, too much energy is spent on alignment; and it is easy to cause the measured beam to deviate from the optical axis of the system, resulting in a larger measurement error of the wavefront

Images