Low-temperature film pressure sensor and producing method thereof

A film pressure and production method technology, applied in the measurement of fluid pressure, elastic deformation meter type fluid pressure measurement, fluid pressure measurement by changing ohmic resistance, etc., can solve problems such as large measurement error, achieve a wide range of applications, The effect of improving the accuracy and improving the accuracy of zero point compensation

Inactive Publication Date: 2007-06-06
NO 11 INST OF NO 6 ACADEMY OF CHINA AEROSPACE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a self-compensating low-temperature thin-film pressure sensor and its production method that can be used for pressure meas

Method used

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  • Low-temperature film pressure sensor and producing method thereof
  • Low-temperature film pressure sensor and producing method thereof
  • Low-temperature film pressure sensor and producing method thereof

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Embodiment Construction

[0037] The low-temperature thin-film pressure sensor of the present invention is shown in FIG. 1 , and is composed of a nozzle 1 , a diaphragm assembly 2 , an adapter seat 3 , a housing 4 , and a socket 5 . The diaphragm assembly 2 includes a diaphragm 21 and a thin film 22 arranged on the diaphragm 21. The thin film 22 is sequentially deposited from the inside to the outside by ion beam sputtering to form a transition layer 6, an insulating layer 7, a strain resistance layer 8, and a compensation resistance layer 9 And the pad layer 10, the diaphragm assembly 2 is stabilized, and one end is bonded to the adapter seat 3, and the other end is welded to the nozzle 1, and the nozzle 1 and the housing 4 are welded, so that the diaphragm assembly 2 is arranged on the housing 4 Inside, the socket 5 is fixedly connected to the housing 4 with screws. The connection of the electrical signal is: the Au pad on the film 22 is connected to the electrical connection pin of the adapter seat ...

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Abstract

This invention disclosed a low-temperature film pressure sensor which consists of take-over neb, film slice, film, transfer seat, hull and jack. The film contains transition layer, insulation layer, resistance layer, compensate resistance layer and weld layer. The manufacture technique was as follows: choose a film, set transition layer, insulation layer, resistance layer, compensate resistance layer and weld layer on this film, photoengrave to obtain weld plate, temperature compensate resistance, zero temperature compensate resistance, strain rosette and zero compensate resistance, modify the value in the above resistance using laser modifying method, assemble the sensor. This invention shows high efficiency and precision.

Description

technical field [0001] The invention relates to a thin-film pressure sensor and a production method thereof, in particular to a low-temperature thin-film pressure sensor and a production method thereof. Background technique [0002] The key to low temperature medium pressure measurement is to ensure that the sensor has a small zero temperature coefficient and sensitivity temperature coefficient. In order to reduce the zero-point temperature coefficient and sensitivity temperature coefficient of the sensor, it is generally used to compensate by connecting a compensation resistor with a certain temperature coefficient in series in the bridge. The temperature compensation range of the existing pressure sensor is limited, the size of the compensation resistance is determined through experiments, and the compensation resistance is connected to the lead plate outside the diaphragm. On the one hand, it is difficult to simulate the low-temperature medium test environment below -40°...

Claims

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Application Information

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IPC IPC(8): G01L19/00G01L19/04G01L9/04G01L7/08
Inventor 陈怀礼刘本伟李辉
Owner NO 11 INST OF NO 6 ACADEMY OF CHINA AEROSPACE SCI & TECH
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