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Base-plate structure of semiconductor package direct electric-connection

A technology of electrical connection and conductive structure, applied in the direction of semiconductor devices, semiconductor/solid-state device components, circuits, etc., can solve the problems of inability to achieve modularization, failure to effectively utilize the multi-functional changes of integrated circuits, and lack of configuration space. , to increase the flexibility of structure space utilization, improve process quality and electrical connection reliability, and improve heat dissipation capacity.

Active Publication Date: 2007-06-13
PHOENIX PRECISION TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Another problem faced by the heat-dissipating semiconductor package of the above-mentioned US patent is that there is no extra space in the package structure to configure passive components, so complete modularization cannot be achieved, and there is no configuration space for connecting other electronic devices. Components, resulting in failure to effectively utilize the performance of the multi-function change of the integrated circuit

Method used

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  • Base-plate structure of semiconductor package direct electric-connection
  • Base-plate structure of semiconductor package direct electric-connection

Examples

Experimental program
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Effect test

Embodiment 1

[0027]Please refer to FIG. 4 , which is a schematic cross-sectional view of a substrate structure directly electrically connected to a semiconductor package of the present invention. The substrate structure 40 directly electrically connected to the semiconductor package includes: a carrying structure, which may be a carrying plate 400, The material constituting the carrier plate 400 may be a metal plate or an insulating plate, and at least one opening 400a penetrating its surface is formed in the carrier plate 400; at least one semiconductor chip 43 is accommodated in the opening 400a of the carrier plate, and its surface There is an electrical connection pad 43a capable of power supply connection; at least one circuit build-up structure 42 is formed on the semiconductor chip 43 and the carrier board 400, and the circuit build-up structure 42 includes a dielectric layer 420 formed on the dielectric layer The circuit layer 421 on the 420 and the conductive structure 422 penetrat...

Embodiment 2

[0029] Please refer to FIG. 5 , which is a schematic cross-sectional view of Embodiment 2 of a substrate structure directly electrically connected to a semiconductor package according to the present invention. The substrate structure 50 directly electrically connected to a semiconductor package in Embodiment 2 of the present invention includes: a carrying structure, The carrying structure is in the form of a circuit board 500, the circuit board 500 has at least one opening 500a through its surface, and a plurality of circuit layers 500b are formed in the circuit board 500, and the circuit layers 500b can be separated by electroplating Interlayer conductive structures 500c such as via holes or conductive blind holes are electrically connected; at least one semiconductor chip 53 is accommodated in the opening 500a of the circuit board, and its surface has an electrical connection pad 53a that can be connected by power supply; at least A circuit build-up structure 52 is formed on ...

Embodiment 3

[0032] Please refer to FIG. 6 , which is a schematic cross-sectional view of Embodiment 3 of the substrate structure directly electrically connected to the semiconductor package of the present invention. The substrate structure 60 directly electrically connected to the semiconductor package in Embodiment 3 of the present invention is roughly the same as in Embodiment 1. Same, the main difference is that the bearing structure 61 is in the form of a multi-layer bearing plate, as shown in the figure, the bearing structure 61 includes a first bearing plate 600 and a second bearing plate 601, the first and second bearing plates 600, 601 may be a metal plate, an insulating plate, or a circuit board, and each of the first and second carrying plates 600, 601 has at least one opening 600a, 601a penetrating through its surface, and the size of the opening 601a of the second carrying plate is larger than The size of the hole 600a of the first carrier plate, and the position of the hole 60...

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PUM

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Abstract

The structure of base plate includes following parts: a load bearing structure with at least a perforative open pore; at least a semiconductor chip with electrical connection pad on surface taken in the load bearing structure; structure of increasing layers for circuits is formed on the chip and the load bearing structure, and conduction structure is formed in the structure of increasing layers in order to connect connection pads electrically; being setup below the load bearing structure partially, a heat sink closes down the said open pore to make the heat sink connect the chip. The structure of base plate integrates semiconductor chip with load bearing piece. The load bearing structure raises heat-sinking capability for electric components. Controlling flattening level raises reliability of subsequent procedure for increasing layers and electrical connection. Advantages are: increasing flexibility of using structure space, and raising electric quality of electronic equipment.

Description

technical field [0001] The present invention relates to a substrate structure directly electrically connected to a semiconductor package, in particular to a semiconductor assembly structure integrating a semiconductor chip and its carrier. Background technique [0002] With the vigorous development of the electronic industry, electronic products tend to be thinner and smaller in form, and gradually enter the research and development direction of high performance, high function and high speed in terms of function. In order to meet the packaging requirements of high integration and miniaturization of semiconductor packages, circuit boards that provide multiple active and passive components and circuit connections have gradually evolved from double-layer boards to multi-layer boards. (Multi-layer board), in a limited space, use the interlayer connection technology to expand the available circuit area on the circuit board to further meet the needs of high-density integrated circ...

Claims

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Application Information

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IPC IPC(8): H01L23/488H01L23/36
CPCH01L2224/32257H01L24/19H01L2224/04105H01L2224/12105H01L2224/19H01L2224/24137H01L2224/24195H01L2224/32245H01L2224/73267H01L2224/92244H01L2924/14H01L2924/15153H01L2924/15155H01L2924/19105H01L2924/00H01L2924/00012
Inventor 许诗滨
Owner PHOENIX PRECISION TECH CORP
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