Method for producing piezoelectric porcelain, method for producing piezoelectric element and piezoelectric element
A technology of piezoelectric ceramics and piezoelectric elements, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problems of high manufacturing costs, Achieve improved sinterability and high sintered density
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Embodiment 1
[0104] (Sample No.1-5, Comparative Example 1, 2)
[0105] Prepare PbO powder, SrCO 3 Powder, TiO 2 Powder, ZrO 2 powder, ZnO powder, Nb 2 o 5 Powder, Ta 2 o 5 powder as the starting material. According to the atomic ratio after sintering (Pb 0.965 Sr 0.03 )[(Zn 1 / 3 Nb 2 / 3 ) 0.1 Ti 0.43 Zr 0.47 ]O 3 The amount of the raw material powder is weighed, and then 0.4% by mass of Ta as an auxiliary component is added to the total weight of each powder. 2 o 5 Powder, wet mixed using a ball mill for 16 hours.
[0106] After the obtained slurry is sufficiently dried, it is kept in air at 700-900° C. for 2 hours to be calcined. The calcined body is pulverized by a ball mill for 2 to 100 hours until the specific surface area shown in FIG. 3 is obtained, and then the pulverized powder is dried. An appropriate amount of PVA (polyvinyl alcohol) was added to the dried pulverized powder as a binder to perform granulation. The granulated powder was molded under a pressure of 2...
Embodiment 2
[0116] Except when the partial pressure of oxygen is lower than that of air but greater than or equal to 1×10 -12 The piezoelectric ceramics were fabricated in the same manner as in Example 1 except that firing was performed in a low-oxygen reducing atmosphere of Pa. The electromechanical coupling coefficient kr and the specific permittivity εr of radial vibration were measured under the same conditions as in Example 1 after the obtained piezoelectric ceramics of Sample Nos. 14-26 and Comparative Examples 3 and 4 were left to stand for 24 hours. The results obtained are shown in Figure 4.
[0117] As shown in FIG. 4 , even when the firing atmosphere was a low-oxygen reducing atmosphere, it was confirmed that there was a tendency similar to that of Example 1 firing in air. That is, by setting the specific surface area of the powder before firing within the range recommended by the present invention, even at low temperature firing at 900-1050°C, a specific permittivity εr of 18...
Embodiment 3-1
[0120] The multi-layer piezoelectric element shown in FIG. 2 was fabricated using the powders before firing of Sample Nos. 1-5 corresponding to Example 1 and Comparative Examples 1 and 2. The piezoelectric layer 11 sandwiched between the internal electrodes 12 has a thickness of 25 μm, and the number of stacked layers is 10. The size of the laminated body 10 is 4 mm in length and 4 mm in width. An Ag-Pd alloy (the Pd content in the Ag-Pd alloy is 20% by mass) was used as the internal electrode 12, and fired in air under the firing conditions shown in FIG. 5 . The amount of displacement when a voltage of 40 V was applied was measured for the obtained piezoelectric element. The result is shown in FIG. 5 .
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Abstract
Description
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Application Information
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