[0009] An embodiment of the present concerns an in-process repairable e-beam deposition source. This is particularly advantageous when used in a tape-manufacturing system for coating elongated substrates as the in-process repairable e-beam deposition source permits creating coatings having integrity over the lengths required to make, for example, HTS conductor practicable, as well as maintaining the integrity on such lengths economically. To that end, the e-beam deposition source may be self-contained so as to be isolatable from the tape-manufacturing system. In this manner, the integrity of a tape substrate that is being processed in the tape-manufacturing system can be maintained, while at the same time, the e-beam deposition source is repaired.
[0010] An isolation mechanism may be provided for isolating an e-beam deposition source from the tape-manufacturing system. For example, an auxiliary chamber communicating with the tape-manufacturing system may be used to accommodate the in-process reparability of an e-beam deposition source. Such auxiliary chamber is evacuatable. The isolation mechanism may further including a closeable passage communicating with an
atmosphere external to the tape-manufacturing system. The closeable passage is capable of a vacuum tight seal such as, for example, a passage able to maintain a pressure of at least about 1
torr. In this manner, an e-beam deposition source is interchangeable, thereby making the deposition source in-process repairable. Further, the auxiliary chamber may include a
retractor capable of moving an e-beam deposition source into the tape-manufacturing system from the auxiliary chamber and back out of the tape-manufacturing system.
[0011] Alternatively, the self-contained e-beam deposition source may further include a redundant filament structure. Again, it may be desirable to provide an isolation mechanism for isolating an e-beam deposition source from the tape-manufacturing system. The filament structure includes at least two filaments and may include up to six filaments. Applicant believes that a redundant filament structure including four filaments would work effectively. The self-contained e-beam deposition source may further include a filament alignment mechanism for aligning an emitting portion of the filament structure with a directing structure of the e-beam deposition source. Such filament alignment mechanism may be particularly beneficial when replacing a spent filament with a replacement filament.
[0014] As noted, the tape-manufacturing system may include a controller that communicates with the at least two e-beam deposition sources and the at least one assist source. The tape-manufacturing system may further include at least one sensor in communication with the controller. Examples of the at least one sensor includes any one of a flow meter, a species monitor (e.g., an
ion current monitor [e.g., a
Faraday cup]), a filament state monitor, a deposition sensor, a temperature sensor, a
pressure sensor, a vacuum sensor, a speed monitor, and combinations thereof. The controller at least regulates the at least two e-beam deposition sources. Also, the controller may regulate the at least one assist source. In addition, the controller may regulate a translational speed of the tape substrate by communicating with a translation mechanism for moving the at least one tape substrate when included with the tape-manufacturing system.
[0020] In an embodiment, the tape-manufacturing system includes at least two assist sources, each being capable of providing a beam of a species to the coating. As with the e-beam sources, the at least two assist sources may be arrange parallelly, serially and, when a plurality are used, parallelly and serially. When arranged parallelly, the assist sources are spaced so that a species density profile of the assist source at the surface of the tape substrate matches an evaporant material flux profile of the at least two e-beam deposition sources at the surface of the tape substrate so as to effect a change to the coating. With parallelly arranged assist sources, it may be desirable to further include a spacer juxtaposed with respect to the assist sources, so as to minimize or prevent an overlap of the beam of species provided from one assist source with the beam of species provided from another assist source at the surface of the tape substrate. The at least two parallelly arranged assist sources may possess mirror symmetry with respect to a longitudinal axis of the at least one tape substrate being coated.