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Method of producing a tubular target

a tubular target and target technology, applied in vacuum evaporation coatings, sputtering coatings, coatings, etc., can solve the problem of insufficient densification and achieve the effect of increasing the sputtering ra

Inactive Publication Date: 2007-04-19
HEIDELBERGER DRUCKMASCHINEN AG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention provides a method for producing a sputtering target that overcomes the disadvantages of previous methods, such as high cost and non-uniform erosion. The method involves using a metal powder with a specific particle size range, cold-isostatic pressing the powder to form a green compact, sintering the green compact at a specific temperature range to achieve a uniform grain size, and joining a supporting tube to the green compact to form a composite tube. The resulting target has a uniform grain size, high density, and is resistant to contamination. The method is cost-effective and produces targets with improved performance.

Problems solved by technology

Below 1600° C., adequate densification is not achieved.

Method used

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Examples

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example

[0045] MoO3 powder was reduced in a two-stage reduction process at 600 and 1000° C. to give Mo metal powder with a grain size of 3.9 μm. In a rubber tube closed at one end, with a diameter of 420 mm, a steel mandrel with a diameter of 141 mm was positioned in the centre. The molybdenum metal powder was filled into the intermediate space between the steel core and the rubber wall.

[0046] This was followed by closing the rubber tube at its open end by means of a rubber cap. The closed rubber tube was positioned in a cold-isostatic press, and compacted at a pressure of 210 MPa.

[0047] The green compact had a density of 64% of the theoretical density. The outer diameter was approximately 300 mm. The green compact produced in this way was sintered in an indirect sintering furnace at a temperature of 1900° C. The sintered density was 94.9% of the theoretical density.

[0048] After the sintering operation, the tube blank was machined on all sides, the outer diameter being 243 mm, the inner ...

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Abstract

A method for producing a tubular target formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 μg / g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 μm and which is connected to a supporting tube. The molybdenum or molybdenum alloy tube is produced by extrusion.

Description

CROSS-REFERENCE TO RELATED APPLICATION [0001] This is a continuing application, under 35 U.S.C. §120, of copending international application No. PCT / AT2006 / 000406, filed Oct. 5, 2006, which designated the United States; this application also claims the priority, under 35 U.S.C. §119, of Austrian patent application No. GM 699 / 2005, filed Oct. 14, 2005; the prior applications are herewith incorporated by reference in their entirety.BACKGROUND OF THE INVENTION Field of the Invention [0002] The invention relates to a method for producing a tubular target, which comprises a tube of molybdenum or a molybdenum alloy with an oxygen content of less than 50 μg / g, a density of greater than 99% of the theoretical density, and an average grain size transversely to the axial direction of less than 100 μm as well as a supporting tube of a non-magnetic material. [0003] A target is understood as meaning the material to be sputtered of a cathode atomization system. Rotating tubular targets are known ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B22F5/12
CPCC23C14/3414B22F3/20B22F5/106B22F7/08C22C1/045B22F2998/10B22F3/04B22F3/1007B22F2003/208B22F2003/248B22F3/17C23C14/34
Inventor ABENTHUNG, PETERHUBER, KARLLACKNER, HARALDLEICHTFRIED, GERHARDPOLCIK, PETERWERATSCHNIG, CHRISTIAN
Owner HEIDELBERGER DRUCKMASCHINEN AG
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