Process for producing microparticles and apparatus therefor
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example 1
[0098] An atomized powder (mean particle size: 45 μm) of In—Sn alloy (Sn: 9.6 wt. %) was introduced to acetylene flame, to thereby synthesize an ITO (In2O3:SnO2=90:10 wt. %) powder under dry conditions. The powder was collected by means of a bag filter under dry conditions, to thereby yield an ITO powder of Example 1.
example 2
[0099] In a manner similar to that of Example 1, an ITO powder was synthesized by means of acetylene flame under dry conditions. The powder was collected by jetting water to the powder under wet conditions, to thereby yield an ITO powder of Example 2.
example 3
[0109] An atomized powder (mean particle size: 45 μm) of In—Sn alloy (Sn: 9.6 wt. %) was introduced to DC plasma flame, to thereby synthesize an ITO (In2O3:SnO2=90:10 wt. %) powder under dry conditions. The powder was collected by jetting water to the powder under wet conditions, to thereby yield an ITO powder of Example 3.
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