Electrolytic apparatus for molten salt

Abstract

An electrolytic apparatus for molten salt disposed on an electrolytic cell to electrolyze an electrolytic bath consisting of the mixed molten salt. The apparatus including a first heat exchanging means to heat and / or cool an electrolytic cell body. The apparatus including a support member comprising one of a flange part and an upper lid. The apparatus including a cover member. The apparatus including an electric insulating material and a gas sealing material disposed between the support member and the cover member for simultaneous electric insulation and gas sealing.

Description

CROSS REFERENCE TO RELATED APPLICATIONS[0001]This application is based upon and claims the benefit of priority under 35 U.S.C. §120 from U.S. patent application Ser. No. 10 / 760,505, filed on Jan. 21, 2004, which claims the benefit of priority under 35 U.S.C. §119 (a)-(d) from prior Japanese Patent Application 2003-013778, filed on Jan. 22, 2003; the entire contents of each of which are incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to an electrolytic apparatus for molten salt, more particularly to an electrolytic apparatus for molten salt, which can be compact, with excellent sealing property.[0004]2. Description of the Related Art[0005]Fluorine gas is an indispensable basic gas in the semiconductor manufacturing field. Further, fluorine gas is used for the semiconductor manufacturing field independently, but nitrogen trifluoride gas (hereinafter referred to as NF3 gas) is synthesized based on fluorine g...

AI Technical Summary

Benefits of technology

[0013]The purpose of the present invention is to provide a compact electrolytic cell body, heat insulation structure such as heat exchanger parts, improvement of electric insulation, gas leakage and work safety.

[0014]Namely, the present invention relates to an electrolytic apparatus for molten salt having an electrolytic cell to electrolyze an electrolytic bath consisting of a mixed molten salt comprising a first heat exchanging means to heat and / or cool the electrolytic cell body, and an outer frame disposed outside of the first heat exchanging means with space and to seal the first exchanging means, and a heat insulating zone capable of decompression or vacuum formed inside the outer frame. According to the present invention, since the electrolytic cell has a decompression or vacuum heat insulation structure, coefficient of thermal conductivity can be extremely low compared with the heat insulator such as asbestos or urethane. As the result, thickness of the heat insulating zone can be thin. Therefore, electrolytic cell can be compact and working safety is improved. Further, the heat energy loss of the electrolytic cell body can be decreased. Also, there are no particles. In addition, in this invention, heat exchanging means for heating and / or cooling the both of the electrolytic cell body is provided. As a result, the efficiency of heat exchanging can be improved by combination of heating and cooling of electrolytic cell with first heat exchanging means. Further, target pressure by decompression or vacuum, approximately 10 kPa-1000 Pa is preferable. When the pressure of heat insulating zone is less than 10 kPa, the thermal conductivity by gases cannot be lowered, which decreases the efficiency of heat insulation. Also, to make the pressure of heat insulating zone less than 100 Pa, another large equipment is required, resulting in high cost. Accordingly, to decompress the pressure of heat insulating zone, 10 kPa to 1 kPa is preferable.

Problems solved by technology

When the pressure of heat insulating zone is less than 10 kPa, the thermal conductivity by gases cannot be lowered, which decreases the efficiency of heat insulation.

Also, to make the pressure of heat insulating zone less than 100 Pa, another large equipment is required, resulting in high cost.

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