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Screw rotor for exhaust pump, method for manufacturing the same, gas exhaust pump having screw rotor, and manufacturing method and assembly method of the same

a technology of screw rotor and screw rotor, which is applied in the direction of waterborne vessels, rotary piston liquid engines, machines/engines, etc., can solve the problem that the supply of only the oil seal member b>113/b> may not be sufficient, and achieve the effect of maintaining a certain rotation performance and high pumping performan

Inactive Publication Date: 2014-05-08
TOHOKU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The gas exhaust pump is a new type of pump that is much better than existing pumps of the same type. It can handle high-speed, continuous, and long-term operation without causing any mistakes. This makes it very effective at pumping gas.

Problems solved by technology

Meanwhile, various types of pumps are used in an apparatus for manufacturing display devices which use semiconductor devices, liquid crystal, organic EL, and the like, and functional devices such as solar cell devices, due to limitations of application ranges depending on the pumping performance.
However, providing only the oil seal member 113 may not be sufficient.

Method used

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  • Screw rotor for exhaust pump, method for manufacturing the same, gas exhaust pump having screw rotor, and manufacturing method and assembly method of the same
  • Screw rotor for exhaust pump, method for manufacturing the same, gas exhaust pump having screw rotor, and manufacturing method and assembly method of the same
  • Screw rotor for exhaust pump, method for manufacturing the same, gas exhaust pump having screw rotor, and manufacturing method and assembly method of the same

Examples

Experimental program
Comparison scheme
Effect test

experiment 1

Experiment on Melting and Remelting of PFA and Smoothness Measurement

[0148]Two plate-like SUS-based materials (SUS316L-EP: 10×10 mm2, thickness: 2 mm) (base materials 1 and 2) were prepared on which predetermined cleaning was performed after mirror polishing. Surface smoothness of mirror finished surfaces of these base materials was measured by using a commercially available profilometer (Dektak 6M available from Veeco Instruments Inc.). Both base materials had a surface roughness Ra of 0.006 μm.

[0149]On a surface of one of them (base material 1) whose surface smoothness was measured, an Ni film (thickness: 2 μm) was provided by electroless plating. Conditions of the electroless plating were as follows:[0150]Electroless plating solution (A): nickel sulfate . . . 26.3 g / l[0151]Sodium hypophosphite . . . 21.2 g / l[0152]Citrate . . . 25.0 g / l[0153]Acetate . . . 12.5 g / l[0154]Rochelle salt . . . 16.0 g / l[0155]Urea . . . 12.5 g / l[0156]pH . . . 6.0[0157]Bath temperature . . . 80° C.

[0158]B...

experiment 2

EXPERIMENT 2

[0183]Other than using semi-cylindrical base materials whose inner surface is a cylindrical concave surface (radius of curvature: 5 cm) instead of the plate-like base materials used in Experiment 1, the same conditions as those in Experiment 1 were set, and the base materials were subjected to Ni treatment and PFA treatment to obtain a sample 2-1 (which was subjected to Ni treatment) and a sample 2-2 (which was not subjected to Ni treatment) for smoothness measurement. Smoothness of the samples was measured in the same manner as in Experiment 1. The measurement results are shown in Tables 2-1 and 2-2.

TABLE 2-1(Sample 2-1)Surface roughnessSurface roughnessX directionRa (μm)Y directionRa (μm)X10.006Y10.006X20.006Y20.006X30.006Y30.006X40.006Y40.006X50.006Y50.006

TABLE 2-2(Sample 2-2)Surface roughnessSurface roughnessX directionRa (μm)Y directionRa (μm)X10.006Y10.006X20.006Y20.006X30.006Y30.006X40.006Y40.006X50.006Y50.006

experiment 3

Experiment on Presence or Absence of Remelting of PFA Film and Smoothness Measurement

[0184]Two plate-like SUS substrates (SUS316L-EP: 2 cm×5 cm) (samples 3-1 and 3-2) were prepared on which mirror polishing was performed, and an Ni film was provided on the mirror-polished surfaces of the SUS substrates in the same manner as in Experiment 1. Surface smoothness of the mirror-polished surfaces of the two SUS substrates and surface smoothness of the Ni film surface were measured in the same manner as in Experiment 1, and substantially the same results as those in Experiment 1 were obtained.

[0185]The Ni films on the two SUS substrates each having the Ni film provided thereon were coated with PFA by outsourcing according to the specification.[0186]Contractor: NIPPON FUSSO CO., LTD.[0187]Topcoat material: ACX-31 (available from Daikin Industries LTD.)[0188]Coating method: Electrostatic coating[0189]PFA coating thickness: 20 μm

[0190]Then, the two SUS substrates coated with PFA we...

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Abstract

There is provided a screw rotor that can ensure safe rotation and can greatly increase a pumping performance of a pump. The screw rotor is placed with a gap between a top end surface of a tooth of a screw portion and an inner wall surface of a stator. A PFA film is provided on the top end surface. If the PFA film of the present invention is provided in a predetermined manner, the width of a gap between a free surface of the PFA film and the inner wall surface of the stator can be made significantly smaller than that of a conventional one, so that the pumping performance is greatly improved. After coating at least the top end surface of the screw rotor with PFA, followed by melting and remelting processes, the PFA film is formed to have a high smoothness on its free surface.

Description

TECHNICAL FIELD[0001]The present invention relates to a screw rotor for a gas exhaust pump used in an apparatus for manufacturing semiconductor devices and electronic devices which use semiconductor-related technology, such as liquid crystal display devices, solar cells, organic FL devices, and LEDs (hereinafter referred to as “semiconductor application electronic devices”), or in an apparatus for manufacturing electronic components for the electronic devices, a method for manufacturing the screw rotor for a gas exhaust pump, a gas exhaust pump having the screw rotor, and a manufacturing method and an assembling method of the gas exhaust pump having the screw rotor.BACKGROUND ART[0002]As a gas exhaust pump capable of high-speed and longtime continuous operation, there is conventionally known, for example, a positive displacement screw pump having a pair of screw rotors in a stator (see NPL 1). Recently, there is a need for establishment of techniques for manufacturing gas exhaust pu...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): F04C2/12
CPCF04C2/126F04C18/16F01C21/08F04C2230/602F04C2230/91F05C2225/04F04C27/001B05D3/0209B05D3/0254C09D129/10
Inventor IWAKI, MASAMICHIOHMIOHYAMA, KENJIAKUTSU, ISAO
Owner TOHOKU UNIV