Elemental Stacked Image Sensor
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[0016]Novel Devices of the Invention.
[0017]In one aspect, the invention encompasses novel pixel devices utilizing stacked, bonded wafers to create functional pixels, i.e. each pixel being a discreet photosensor element capable of converting incident light to charge, converting charge to a readout signal, and outputting such signal to a memory or signal processing component. In one embodiment, the stacked pixel of the invention comprise a photodiode, a transfer gate, and two interconnects, which are fabricated on a first wafer, while the remaining components required for pixel function are fabricated on a second wafer, as illustrated in FIG. 1. The two wafers are then aligned and bonded to create a functional photosensor element.
[0018]Reference will be made to pixel components residing on a first and a second wafer, and the description herein will be directed to the configuration of the components making up each individual pixel. It will be understood that components of multiple pixe...
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Abstract
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