Interfacial layer for optical film performance

Abstract

A method of forming an optical device is provided. The method includes disposing an optical device substrate on a substrate support in a process volume of a process chamber, the optical device substrate having a first surface; and forming a first optical layer on the first surface of the optical device substrate during a first time period when the optical device substrate is on the substrate support, wherein the first optical layer comprises one or more metals in a metal-containing oxide, a metal-containing nitride, or a metal-containing oxynitride, and the first optical layer is formed without an RF-generated plasma over the optical device substrate; and forming a second optical layer with an RF-generated plasma over the first optical layer during a second time period when the optical device substrate is on the substrate support.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application claims the benefit of U.S. Provisional Patent Application No. 63 / 165,566, filed on Mar. 24, 2021, the contents of which are herein incorporated by reference.BACKGROUNDField[0002]Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to an optical device layer stack, an optical device formed from the optical device layer stack, and methods of forming an optical device layer stack.Description of the Related Art[0003]Virtual reality is generally considered to be a computer generated simulated environment in which a user has an apparent physical presence. A virtual reality experience can be generated in 3D and viewed with a head-mounted display (HMD), such as glasses or other wearable display devices that have near-eye display panels as lenses to display a virtual reality environment that replaces an actual environment.[0004]Augmented reality, however,...

AI Technical Summary

Benefits of technology

The patent text describes a method for improving optical devices, specifically for use in augmented reality applications. The method involves forming layers of the optical device using a process called atomic layer deposition (ALD), which allows for better control of optical performance. The first layer is formed without an RF-generated plasma, while the second layer is formed with RF-generated plasma. This method helps to reduce optical loss and light scattering, which can lower the performance of optical devices. The technical effect of this patent is to provide better optical devices for augmented reality applications with improved optical performance.

Problems solved by technology

As an emerging technology, there are many challenges and design constraints with augmented reality.

One such challenge is displaying a virtual image overlaid on an ambient environment.

Despite numerous advances in the field of optical devices and methods used to form optical devices, optical loss and light scattering inside the optical device remain a problem.

Optical loss and light scattering lower the optical performance of optical devices and can ultimately give users of the optical devices (e.g., augmented reality devices) an unsatisfactory experience.

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