2results about How to "Average distribution" patented technology

This invention provides a semiconductor manufacturing process, comprising using a computer system to divide a wafer area into multiple exposure areas and distribute multiple observation points in each exposure area (shot), identifying a portion of boundary areas from all exposure areas, calculating the number of observation points in each boundary area, and eliminating boundary areas with fewer than 3 observation points, counting the observation points in the remaining boundary areas, and deleting a portion of the observation points until the total number of observation points meets a preset total and the observation points are uniformly distributed, and performing an alignment measurement step on the remaining observation points to generate an offset vector map.

This invention provides a power distribution unit and a charging device. The power distribution unit includes: a plurality of distribution components arranged sequentially along a first direction; each distribution component includes a circuit board and a plurality of onboard relays; the circuit board extends along a second direction, and each onboard relay is disposed on the circuit board; the second direction is perpendicular to the first direction; a bus assembly including a plurality of first busbars and a plurality of second busbars, the first busbars crossing at least one distribution component and connecting one end of each onboard relay located in different distribution components, the second busbars connecting the other end of each onboard relay located in the distribution component to connect or disconnect current loops through the onboard relays; an outer frame including at least two side frames arranged along the second direction; the two ends of the circuit board in the distribution component along the second direction are inserted and fixed to the corresponding side frames along a third direction. This power distribution unit has the advantages of small size, low cost, and convenient maintenance.