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Regulatable optical appliance based on micro electromechanical system technology

A technology of micro-electromechanical systems and optical devices, applied in the field of optical communication, can solve problems such as difficulties, and achieve the effects of small WDL, good mechanical stability, and low power consumption

Inactive Publication Date: 2007-10-24
侯继东
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is very difficult to manufacture a multi-cavity Fabry-Perot interferometer with a macroscopic object, because a very precise relationship between the cavities must be ensured

Method used

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  • Regulatable optical appliance based on micro electromechanical system technology
  • Regulatable optical appliance based on micro electromechanical system technology
  • Regulatable optical appliance based on micro electromechanical system technology

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Experimental program
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Embodiment Construction

[0053] FIG. 1 is a cross-sectional view of a tunable optical element A10 with a doped silicon substrate and two optical cavities. The substrate A11 in the figure is a doped single crystal silicon wafer. A20, A40 and A60 are silicon dioxide layers. The first optical cavity A41 and the second optical cavity A61 are formed after the silicon dioxide layers A40 and A60 are etched away in the light-passing area and its surroundings. A first non-optical cavity A21 is formed after etching away the silicon dioxide layer A20 in the same area. A30, A50, and A70 are the first adventitia, the middle membrane, and the second adventitia, respectively. A80 is a through hole distributed around the light-passing area and penetrating each optical film. A90 is a through hole penetrating through the doped silicon substrate A11 on the light passing region.

[0054] 2a and 2b are schematic diagrams of the manufacturing process of an optical element with a doped silicon substrate and two optical ...

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Abstract

Surface micro mechanical structure and cavities between thin films are adopted in core parts of optical switch, adjustable attenuator and tunable filter in the invention. Optical F-P interferometer is made from multilayer dielectric films composed on high refractive index dielectric layers and low refractive index dielectric layers alternately in order to guarantees good optical characteristics micro mechanical structure and technique makes the product easy to be manufactured and assembled. Power consumption is low since technique of static drive is utilized.

Description

1. Technical field: [0001] The invention relates to the technical field of optical communication, in particular to an adjustable attenuator, an optical switch and an adjustable filter. 2. Technical background: [0002] DWDM (Density Wavelength Division Multiplexing) technology greatly expands the transmission capacity of optical fiber networks. With this technology, one fiber can be used to transmit dozens of channels within the range of 1530 nm to 1570 nm, each channel corresponding to a wavelength. With the development of optical fiber communication, the structure of optical fiber network becomes more and more complex. In order to make the optical fiber network work normally and orderly, the network should be flexible and expandable. These properties depend on the application of tunable optics, such as optical switches, tunable attenuators, and tunable filters. [0003] Optical switches are used to route optical channels, or to control the direction of transmission of o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/35H01L21/00H04B10/12
Inventor 侯继东
Owner 侯继东