Automatic material transport system for semiconductor production

A transportation system and semiconductor technology, applied in the direction of transportation and packaging, conveyor objects, furnaces, etc., can solve the problems of bulky, space-occupied and inconvenient to use, and achieve the effect of easy movement, three-dimensional space saving, and convenient movement

Inactive Publication Date: 2008-11-19
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the object of the present invention is to provide an AMHS for semiconductor manufacturing, which has a storage box that can save space and is easy to move, so as to solve the problems that the storage box in the prior art is bulky, takes up space and is inconvenient to use

Method used

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  • Automatic material transport system for semiconductor production
  • Automatic material transport system for semiconductor production
  • Automatic material transport system for semiconductor production

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Embodiment Construction

[0034] The invention discloses an automatic material transportation system for semiconductor manufacturing, which can greatly save the three-dimensional space in the FAB. The automatic material transportation system disclosed by the present invention realizes loading and unloading of the materials in the storage boxes in the WIP storage unit of the vertical conveyor belt by using an aerial elevator located above each storage box.

[0035] The automated material handling system of the present invention can be applied in a product manufacturing environment, such as a clean environment for manufacturing IC chips, to automatically store and transport WIP components between workstations and / or processing machines. Includes WIP storage unit and aerial lift delivery subsystem. The storage box includes a plurality of input and output windows in which the cassette container FOUP is placed. The aerial elevator conveying subsystem includes a suspended rail and a plurality of aerial elev...

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Abstract

This invention provides an automatic transportation system for materials producing semiconductors including: at least one storage box including at least one storage unit and a transportation unit with an air transportation car running on the track of the ceiling containing a mechanical arm picking up at least a set of materials from a selected storage unit and transporting them to a preset position, the height of the box is one third to one half of the distance from the floor to the ceiling, which saves cubic space in FAB.

Description

technical field [0001] The present invention relates to material handling equipment, and more particularly to an automated material handling system (AMHS) used in a semiconductor manufacturing workshop (FAB). Background technique [0002] Automated material handling systems are widely used in the integrated circuit (IC) chip manufacturing industry. In the product manufacturing environment, WIP storage units and aerial lift mechanisms are used to store WIP components and transfer components between workstations and processing equipment. A typical manufacturing process for an IC chip includes multiple steps, including oxidation, photolithography, diffusion, deposition, cleaning, ion implantation, etching, and the like. These processes are usually performed by different processing equipment, such as chemical vapor deposition chambers, ion implantation chambers and etchers. Accordingly, the semiconductor wafer WIP is typically transferred multiple times between different workst...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677B65G49/07
Inventor 赵增利郭延中马魁武丁江波
Owner SEMICON MFG INT (SHANGHAI) CORP
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