Automatic material transport system for semiconductor production

A transportation system and semiconductor technology, applied in the direction of transportation and packaging, conveyor objects, furnaces, etc., can solve the problems of bulky, space-occupied and inconvenient to use, and achieve the effect of easy movement, three-dimensional space saving, and convenient movement
CN100435310CInactive Publication Date: 2008-11-19SEMICON MFG INT (SHANGHAI) CORP +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SEMICON MFG INT (SHANGHAI) CORP
Publication Date
2008-11-19
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention provides an automatic transportation system for materials producing semiconductors including: at least one storage box including at least one storage unit and a transportation unit with an air transportation car running on the track of the ceiling containing a mechanical arm picking up at least a set of materials from a selected storage unit and transporting them to a preset position, the height of the box is one third to one half of the distance from the floor to the ceiling, which saves cubic space in FAB.
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Description

technical field

[0001] The present invention relates to material handling equipment, and more particularly to an automated material handling system (AMHS) used in a semiconductor manufacturing workshop (FAB). Background technique

[0002] Automated material handling systems are widely used in the integrated circuit (IC) chip manufacturing industry. In the product manufacturing environment, WIP storage units and aerial lift mechanisms are used to store WIP components and transfer components between workstations and processing equipment. A typical manufacturing process for an IC chip includes multiple steps, including oxidation, photolithography, diffusion, deposition, cleaning, ion implantation, etching, and the like. These processes are usually performed by different processing equipment, such as chemical vapor deposition chambers, ion implantation chambers and etchers. Accordingly, the semiconductor wafer WIP is typically transferred multiple times between different workst...

Claims

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