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Method and apparatus for removing ozone

A technology of ozone and electrolysis device, applied in separation methods, chemical instruments and methods, separation of dispersed particles, etc., can solve problems such as life limitation, high processing cost, process safety and human health hazards, and achieve the effect of proper treatment

Active Publication Date: 2008-12-24
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because ozone itself is a strong oxidant and highly corrosive, and its low solubility in water can easily dissipate into the air, resulting in a low concentration that will have adverse effects on the human respiratory system. Therefore, if the residual ozone in the process is not properly handled, Will cause great harm to process safety and human health
[0003] At present, the technologies for treating residual ozone can be roughly divided into the following categories, including decomposition with manganese dioxide catalyst, decomposition with UV light irradiation, reduction with sodium sulfite chemical agent, or introduction of external air for dilution. Or the effect is not significant and other factors, it is still unable to provide a perfect solution, such as manganese dioxide catalyst (requires heating) or UV light irradiation to decompose ozone, the use of materials has a life limit and the operation cost is expensive, the cost of sodium sulfite chemicals Expensive and cannot be reused, and the external air dilution method cannot effectively reduce the hazards of ozone to industrial safety and human health

Method used

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  • Method and apparatus for removing ozone
  • Method and apparatus for removing ozone
  • Method and apparatus for removing ozone

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] The present invention carries out ozone treatment test in A, B two factories, and test condition is as follows:

[0049] The ozone intake volume is 1.5 liters / min, the volume of the ferrous ion washing liquid is 600 ml, the contact equipment is an aeration tank, and the ferrous ion concentration is 2,500 mg / l. Its ozone treatment efficiency can reach more than 95%. For test results see Figure 5 (Factory A) and Figure 6 (Factory B).

Embodiment 2

[0051] Using a rotating packed bed as a contact device, the ozone treatment efficiency test was carried out on washing liquids with different concentrations of ferrous ions at different rotational speeds. For the test results, please refer to Figure 7 to Figure 15 .

[0052] Figure 7 Indicates the relationship between different rotary packed bed speeds and gas-liquid ratios on the ozone treatment efficiency when the ozone intake rate is 2.9 liters / minute and the concentration of the ferrous ion washing solution is 1,000 mg / liter. Figure 8 Indicates the relationship between different rotating packed bed speeds and gas-liquid ratios on the ozone treatment efficiency when the ozone intake rate is 2.9 liters / minute and the concentration of the ferrous ion washing solution is 2,500 mg / liter. Figure 9 Indicates the relationship between different rotary packed bed speeds and gas-liquid ratios on ozone treatment efficiency when the ozone intake rate is 2.9 liters / minute and the c...

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Abstract

The invention provides a method and means of removal of ozone. The invention of the means including: a reaction tank, containing a solution of ferrous ions, ozone into contact with a redox reaction, make ozone reduction into oxygen, oxidation of ferrous into iron ions; And a reduction means will make iron ions reduction into ferrous ions, in a sustained supply reaction to the trough redox reaction. The present invention also provides a method of removal of ozone, including: Introduction of ozone gas to a solution containing ferrous ions reaction trough so that ferrous ions in contact with the ozone oxidation, then redox reaction take place, which ozone into oxygen reduction, ferrous into iron ions oxidation; And through a reduction means will make iron ions reduction into ferrous ions, in a sustained supply reaction to the trough redox reaction. This invention has considerable economic value, so that ozone gas in the minimum amount of chemicals added to properly handle the situation.

Description

technical field [0001] The invention relates to an environmental safety device, in particular to a device and method for removing ozone. Background technique [0002] At present, high-tech industries such as optoelectronics and semiconductors use a large amount of ozone to create oxide films or clean the surface of wafers and glass substrates in the process. Because ozone itself is a strong oxidant and highly corrosive, and its low solubility in water can easily dissipate into the air, resulting in a low concentration that will have adverse effects on the human respiratory system. Therefore, if the residual ozone in the process is not properly handled, It will cause great harm to process safety and human health. [0003] At present, the technologies for treating residual ozone can be roughly divided into the following categories, including decomposition with manganese dioxide catalyst, decomposition with UV light irradiation, reduction with sodium sulfite chemical agent, or...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/66B01D53/78
CPCY02A50/20
Inventor 游惠宋徐树刚徐淑芳卓连泰
Owner IND TECH RES INST