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Microwave plasma back-coating and re-coating method for CVD diamond coating cutter

A microwave plasma and diamond coating technology, which is applied in metal material coating process, coating, gaseous chemical plating, etc., to achieve the effect of high stripping and recoating efficiency

Inactive Publication Date: 2009-02-18
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims at the deficiencies of the existing CVD diamond-coated tool removal coating method, and provides a simple, convenient, and efficient microwave plasma decoating and recoating method for CVD diamond-coated tools, so that the service life of the tool after recoating and refurbishment is improved. Meet or even exceed the service life of newly purchased CVD diamond-coated tools

Method used

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  • Microwave plasma back-coating and re-coating method for CVD diamond coating cutter
  • Microwave plasma back-coating and re-coating method for CVD diamond coating cutter

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Embodiment

[0015] This embodiment takes the worn CVD diamond-coated solid end mill (diameter: 16mm, helix angle: 30°, number of teeth: 2 teeth, total length: 80mm, blade length 20mm, CVD diamond coating thickness: 40μm) as an example . Decoating and recoating are performed in a microwave plasma vacuum chamber 3 . As shown in the drawings, an electromagnetic coil 5 is installed on the periphery of the microwave plasma vacuum chamber 3, a tray 4 is installed inside, an oxygen inlet 6 is arranged at the lower part, and a microwave plasma beam inlet 7 is arranged at the top.

[0016] Concrete decoating and recoating include the following steps (see accompanying drawing):

[0017] (1) Fix the worn CVD diamond-coated tool 1 on the pallet 4 of the microwave plasma vacuum chamber 3 with the fixture 2 .

[0018] (2) Make the electromagnetic coil 5 power off, after the microwave plasma vacuum chamber 3 is evacuated, make the pressure in it lower than 900Pa, open the oxygen inlet 6 to input oxyge...

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Abstract

A microwave plasma re-coating method for CVD diamond coating cutter is carried out by machining oxygen entrance at lower part of microwave plasma vacuum chamber, fixing CVD diamond coating cutter in microwave plasma vacuum chamber, power cutting for electromagnetic coil, vacuum supplying for microwave plasma vacuum chamber, inducing into oxygen and 2.45GHz microwave plasma beam, burning for cutter diamond coating to form into grain, cooling to remove grain, cleaning cutter, putting it in microwave plasma vacuum chamber, growing diamond coating by microwave plasma CVD process and re-coating. It's simple, convenient and efficient and has a long usage life.

Description

technical field [0001] The invention relates to a method for decoating and recoating of CVD diamond-coated tools, and belongs to the technical field of coated tools. Background technique [0002] CVD diamond is a synthetic diamond film on heterogeneous substrates (such as high-speed steel, cemented carbide, ceramics, etc.) by chemical vapor deposition (CVD for short). This technology has been applied to cutting tools, called CVD diamond-coated tools , whose performance is close to that of natural diamond, is mainly used in the cutting of non-ferrous metals and their alloys such as aluminum-silicon alloys, copper alloys, fiber-reinforced polymers, ceramics, graphite, etc. During processing, the cutting speed is high, the processing efficiency is high, and the tool life is long. The main disadvantage of CVD diamond-coated tools is the high cost compared to high-speed steel, cemented carbide, ceramics and other tool materials; in addition, the tool needs to be replaced immedia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/513C23C16/27C23C16/52
Inventor 刘战强刘继刚艾兴
Owner SHANDONG UNIV