Photovoltaic element
A technology of optoelectronic components and photocurrent, which is used in electrical components, photovoltaic power generation, circuits, etc.
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Examples
Embodiment 1-1
[0109] The present example, shown in detail below, was fabricated in a roll-to-roll manner figure 1 The diagram of the structure shown in the cross-sectional schematic diagram, the protective part is set after cutting.
[0110] As the substrate 101 , a rolled SUS430 having a width of 35 cm, a length of 200 m, and a thickness of 0.15 mm provided with unevenness generally called a mat finish was used. use with figure 2 The same device was used as a DC magnetron sputtering device, in which silver and zinc oxide targets of 48 cm in the width direction and 24 cm in the conveying direction were set on the electrode part, and the gas was exhausted to a pressure of 2 mpa or less. Thereafter, argon gas was supplied to each film forming chamber at a rate of 30 cc / min, and the pressure was maintained at 0.3 Pa. The substrate was continuously conveyed from the delivery chamber 201 to the take-up chamber 209, heated to 200°C from the back side, and a DC power of 4 kW was applied to form...
Embodiment 1-2、1-3、 comparative example 1-1、1-2、1-3
[0128] A photovoltaic element was completed in the same manner as in Example 1-1, except that the amount of silane supplied and the high-frequency power were changed as shown in Table 5 when forming the i-type microcrystalline semiconductor of the second pin junction. In addition, the reason for changing the silane supply amount and the high-frequency power at the same time is that the appropriate electric power changes according to the silane supply amount.
[0129] For these examples and this comparative example, the spectral sensitivity before and after the installation of the transparency protection member was measured, and the generated photocurrent was calculated from the AM1.5 sunlight spectrum of JIS. The results are shown in Table 5 (the results are the same as in Table 1).
[0130]Spectral sensitivity was measured using YQ-250BX manufactured by JASCO Corporation. For the size of a sample with a width of 35 cm and a length of 24 cm, it is the average value measured a...
Embodiment 2-1，2-2
[0135] (Example 2-1, 2-2, Comparative Examples 2-1, 2-2, 2-3)
[0136] A photovoltaic device was completed in the same manner as in Example 1-1, except that the transport speed was changed as shown in Table 6 when the i-type microcrystalline semiconductor of the second pin junction was produced.
[0137] For these Examples and Comparative Examples, the spectral sensitivity before and after the installation of the transparency protection member was measured, and the generated photocurrent was calculated from the AM1.5 sunlight spectrum of JIS. The results are shown in Table 6. In addition, the conversion efficiencies at the initial stage and after the deterioration test are also shown in Table 6 as before.
[0138] Table 6
[0139]
Transport speed
(mm / min)
Protective parts are installed
Front / back first pin
junction photocurrent
(mA / cm 2 ) Protective parts are installed
Front / rear second pin
junction photocurrent
(mA / cm 2 )...
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Abstract
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