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Multilayer ceramic substrate, method for making the same, and composite green sheet for making multilayer ceramic substrate

A technology of multi-layer ceramics and manufacturing methods, applied in the direction of multi-layer circuit manufacturing, etc., can solve the problems of warping of multi-layer ceramic substrates, and the reduction of the effect of restraining the shrinkage of the limiting layer, so as to suppress deformation, reduce dimensional shift, and restrain shrinkage. Effect

Inactive Publication Date: 2009-08-12
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the constrained layer becomes thinner, the shrinkage suppression effect by the constrained layer also decreases.
As a result, warpage often occurs in the obtained multilayer ceramic substrate

Method used

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  • Multilayer ceramic substrate, method for making the same, and composite green sheet for making multilayer ceramic substrate
  • Multilayer ceramic substrate, method for making the same, and composite green sheet for making multilayer ceramic substrate
  • Multilayer ceramic substrate, method for making the same, and composite green sheet for making multilayer ceramic substrate

Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0132] In the experimental example, multilayer ceramic substrates of the following samples 1 to 5 were produced.

[0133] (1) Sample 1

[0134] Sample 1 corresponds to an embodiment within the scope of the present invention, and has Figure 14 The raw laminated body 31 of the structure shown was obtained. Figure 14 It is a front view showing the unprocessed laminated body 31 in cross section.

[0135]The unprocessed laminated body 31 includes a base material layer 32, a restriction layer 33, and an intermediate layer 34 in an unprocessed state, and three layers are stacked on each side of the restriction layer 33 of one layer with an intermediate layer 34 interposed therebetween. The structure of the matrix material layer 23. In addition, in the raw laminated body 31 , a plurality of outer conductor films 35 are formed on the upper main surface and a lower main surface, respectively, and a plurality of inner conductor films 36 are formed inside. The internal conductor fil...

experiment example 2

[0177] This experimental example was carried out in order to obtain a desired relationship with respect to each of the thermal expansion coefficients of the base material layer, the constraining layer, and the intermediate layer provided on the multilayer ceramic substrate.

[0178] 1. Production of raw board

[0179] (1) raw board for base material layer

[0180] Precipitated CaO·SiO mixed with an average particle size of 2 μm 3 crystallized glass SiO 2 -CaO-Al 2 o 3 -B 2 o 3 (44:47:5:4) 50 parts by weight of glass-like powder, 50 parts by weight of alumina powder with an average particle diameter of 1.5 μm, 50 parts by weight of water as a dispersant, 20 parts by weight of polyvinyl alcohol as a binder, 1 weight part of polycarbonate-based dispersant as a dispersant is used as a slurry. After removing air bubbles from the slurry, the slurry is formed into a thin plate by a doctor blade method, and dried to obtain a green sheet that should be a base material layer with ...

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Abstract

Form a confining layer comprising a second ceramic material that does not sinter at a temperature capable of melting the crystallized glass material between the base material layers comprising the crystallized glass material and the first ceramic material to be manufactured, and suppress firing while passing through the confinement layer. When shrinking the base material layer during formation, while making the crystallized glass material contained in the base material layer penetrate into the constraining layer and densifying the constraining layer as a multilayer ceramic substrate, the crystallized glass material contained in the base material layer may not be sufficient. penetrating into the limiting layer. In order to solve this problem, an intermediate layer (4) containing a viscosity-decreasing substance that acts to reduce the viscosity of the melt of the crystallized glass material is formed between the base material layer (2) and the restricting layer (3), and in the firing step , the viscosity of the melt of the crystallized glass material contained in the base material layer (2) is lowered, and it becomes easy to permeate through the restriction layer (3). As the viscosity-decreasing substance, a low-viscosity glass material and / or a low-melting glass material is used.

Description

technical field [0001] The present invention relates to a multilayer ceramic substrate, a manufacturing method thereof, and a composite raw board for making a multilayer ceramic substrate, in particular to a multilayer ceramic substrate manufactured by a so-called non-shrinkage process, a manufacturing method thereof, and a composite raw board for making a multilayer ceramic substrate. plate. Background technique [0002] As a multilayer ceramic substrate of interest in the present invention, there is, for example, one described in Japanese Unexamined Patent Application Publication No. 2000-25157 (Patent Document 1). Patent Document 1 describes a composite laminate based on a so-called shrinkage-free process and its manufacturing method, and more specifically, describes that it can be manufactured while suppressing shrinkage caused by firing, and that it can be intact in the state after firing. Although the composite laminated body and its manufacturing method used in the f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05K3/46
Inventor 中尾修也
Owner MURATA MFG CO LTD
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