Method for measuring microstructure rotation movement based on multiple centroid relative position invariability

Abstract

The invention discloses a measuring micro structure whirligig method based on the invariable multi-centroidal relative position. The measuring method includes the catching the micro structure sport sequence image, selecting the isolated image character in micro structure image, distilling the isolated image centroidal, tracking the isolated image character in sport sequence image, analysis of the locus of multi centroidal link in sport sequence image and computing the rotating angle. The merits of the invention are: while the micro structure does the rigidity movement in plane, the change of locus of the isolated image centroidal can reflect the displacement, however, the relative position between two or more centroidals does not change, so the locus changing of the centroidal link can reflect the rotating angle. So it can pick up the plane rotating angel precisely by many isolated image centroidal link. The process is simple and has small compute but has high measurement distinguishability.

Description

technical field [0001] The invention relates to a method for measuring the rotational motion of a microstructure based on the relative position invariance of multiple centroids, which belongs to the photoelectric non-contact mechanical quantity measurement technology for micro-electromechanical systems. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) is developed on the basis of microelectronics technology. It is an integrated device or system composed of electronic and mechanical components. It is manufactured by a mass-processing process compatible with integrated circuits. At the same time, computing, sensing and execution are integrated, thus changing the way of perceiving and controlling the natural world. Most of the manufacturing processes of microelectromechanical systems (MEMS) are compatible with the processing technology in the field of microelectronics technology, but a considerable number of MEMS devices contain movable structures, which is...

AI Technical Summary

Problems solved by technology

Through the comprehensive analysis and comparison of existing technologies, the technical solutions reported at present mainly have the following problems in practical applications: (1) Image matching is to select a sub-region in an image, and then select a sub-region in other images Search for the best matching sub-area, the relative position of the two sub-areas is the displacement amount, since the search is obtained by translating the sub-area, if there is a rotational movement, the sub-area needs to be rotated by different angles, and then the translation search is performed, and the calculation amount is very large large; (2) If the image correlation is performed in the time domain, the above-mentioned angle search traversal also exists, and the calculation amount is very large. If the image is converted from spatial coordinates to polar coordinates, the calculation amount is reduced, but the conversion from the rectangular coordinate system In the polar coordinate system, there is a problem of uneven sampling, that is, the image pixels close to the origin of the polar coordinates are sampled too densely, while the samples farther from the origin are too sparse, and each pixel contributes differently to the image in the transform domain, so the measurement of the rotation angle The resolution is not high; (3) The rotation angle measurement by extracting the edge of the image generally requires the edge to be a straight line, which limits the adaptability of the method; (4) The rotation angle of the microstructure is generally small, and the measurement resolution is required to be very high. High, the current measurement methods for macroscopic rotation angles cannot fully meet the requirements for the measurement resolution of microstructure rotation angles, and these measurement methods fail to take into account the common image features that exist on MEMS microstructures

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