Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator

Abstract

An air spring ultra-low frequency vibration isolation method and device based on a differential electromagnetic actuator, the invention belongs to the field of ultra-low frequency vibration isolation. The air spring vibration isolation foundation is coupled with the transverse and longitudinal stiffness of the air spring, resulting in transverse and longitudinal ultra-low frequency vibration isolation performance. Can't do both. The product of the invention includes: an air supply system (1), a height control system (2), a group of air springs (3), a base (4), an electromagnetic action that not only provides negative stiffness for the system, but also provides controllable damping force for the system. actuator (5), speed sensor (6), force sensor (7), displacement sensor (8), power amplifier (9), analog / digital converter (10), digital / analog converter (11), controller (12). The present invention utilizes the interaction between the electromagnets and the armatures fixed on the base and on the ground to provide negative stiffness and controllable active damping force for the system, and is used in occasions requiring high transverse and longitudinal ultra-low frequency vibration isolation performance .

Description

technical field [0001] The invention belongs to the field of ultra-low frequency vibration isolation, in particular to an air spring ultra-low frequency vibration isolation method and a device used in the method. Background technique [0002] The air spring vibration isolation foundation is widely used in the field of vibration isolation due to its good low-frequency vibration isolation effect, strong bearing capacity, and long service life. With the continuous improvement of ultra-precision machining and measurement, micro-nano technology and VLSI manufacturing precision, higher requirements are put forward for the ultra-low frequency vibration isolation performance and bearing capacity of the vibration isolation foundation. However, the current air spring vibration isolation foundation has limited its further application in the field of ultra-low frequency vibration isolation to a large extent because of its unsatisfactory ultra-low frequency vibration isolation performanc...

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Problems solved by technology

This scheme uses a single electromagnet, so only approximate processing can be used, and real linearization cannot be achieved, which directly affects its control accuracy

In addition, its control method is complex in principle and difficult to implement, so it is difficult to use it in engineering practice.

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