Manufacture method of high resolution self-supporting totally hollowed-out transmission grating
A high-resolution, transmission grating technology, applied in the field of X-ray diffraction optical elements, can solve the problems of low efficiency and inability to produce high aspect ratio graphics, etc.
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[0034] Black used in the drawings indicates opaque portions, and gray indicates translucent portions. It conforms to the usual representation method in the field of microelectronics technology.
[0035] 1. As shown in Figure 1-1, a thin chromium and thin gold layer 103 is deposited on the self-supporting X-ray mask substrates 101 and 102 as an electroplating substrate; the thickness of the thin chromium and thin gold film 103 is 10 to 30 nm, which is Obtained by electron beam evaporation;
[0036] 2. As shown in Figure 1-2, apply an electron beam photoresist on the surface of the thin chromium and thin gold layer 103, and perform electron beam lithography to obtain a high-resolution grating pattern 104;
[0037] 3. As shown in Figure 1-3, using the grating pattern 104 as the electroplating mold, place the sheet in the gold electroplating solution to electroplate the X-ray mask absorber gold pattern 105;
[0038] 4. As shown in FIG. 1-4, the electron beam photoresist grating ...
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