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Two-dimensional rotary remote operating method for micro structural components

A technology of micro-components and remote manipulation, applied in the field of micro-systems, which can solve problems such as difficult applications

Inactive Publication Date: 2010-05-26
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] The inventor had previously applied for an invention patent titled "Telecontrol Method for Two-Dimensional Translation of Micro Components", which involved a method of two-dimensional translation of micro components using ultrasonic radiation force. In practical applications, the regular actions of components are generally composed of a combination of translation and rotation

Method used

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  • Two-dimensional rotary remote operating method for micro structural components
  • Two-dimensional rotary remote operating method for micro structural components
  • Two-dimensional rotary remote operating method for micro structural components

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Embodiment Construction

[0027] see figure 1 . The radiation power of the four ultrasonic transducers 1, 2, 3, and 4 is equal, the frequency is 1.75MHz, and the radius is 10mm. In the interference area, the ultrasonic traveling wave field of the helical wave front is formed. The layout is shown in the figure , respectively located in the four quadrants formed by the X-axis and the Y-axis. The initial phases of the 4 transducers are controlled so that 2 is delayed by 90° relative to 1, 3 is relative to 2, and 4 is relative to 3.

[0028] Such as figure 2 As shown, due to the mutual interference of the same-frequency ultrasonic waves and the specific phase relationship between the four transducers, the ultrasonic traveling wave of the helical wavefront is formed in the paraxial region of the Z-axis, and the corresponding sound ray propagation direction is a helical line.

[0029] The target micro-component 5 is in the shape of a cuboid, such as image 3 As shown, placed symmetrically on the Z-axis....

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Abstract

A 2-D rotary remote-controlling method of micro-component includes setting four ultrasonic transverters on the same plane and arranging them to be a square form, setting plane of four ultrasonic transverters to be parallel with rotary plane of object micro-component, setting two adjacent ultrasonic transverters together closely with their distance being two times of their radius and with their radiation wavewidth of 10-40mm as well as with their sound wave frequency of 1.5-2.0Kh2, setting frequency of four ultrasonic wave beams to be the same and adjacent relation of various ultrasonic wave beams to be 90degree delay successively.

Description

technical field [0001] The invention belongs to the field of microsystems, and more specifically relates to the remote manipulation technology of micro components in micron to nanometer scales. Background technique [0002] Micro-System Technology (Micro-System Technology) as a technology to understand and transform the objective world in the microscopic field, especially with the development from unit device production to integrated hybrid systems, the manipulation and assembly technology of micro-components has become more important. sex and urgency. Therefore, exploring new theories and mechanisms to develop this technology is a fundamental key research topic in the field of microsystem technology. [0003] At present, the mechanism of micro-component manipulation technology mainly includes: [0004] The first category is to extend the manipulation technology in macroscopic assembly to microscopic field applications, such as micro tweezers, micro pipettes and so on. Th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00B81C3/00B81C5/00B81C99/00
Inventor 杨克己范宗尉桑武斌乔华伟
Owner ZHEJIANG UNIV