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Device for measuring paramagnetic oxygen and method for manufacturing and operating the said device for measuring oxygen

A measuring device, paramagnetic technology, applied in the direction of analysis using electron paramagnetic resonance, etc., can solve the problems of miniaturization limitation, short response time, and failure to reach, and achieve the effect of small size

Inactive Publication Date: 2007-10-24
ABB PATENT GMBH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Although this method can realize highly sensitive measurement of oxygen content, it still has the following disadvantages in known sensors: the sample body made by conventional methods cannot reach short reaction time
For this purpose, the device must be equipped with gas inlet and outlet ducts as well as corresponding electrical and magnetic components, wherein the miniaturization of the conventional construction forms is very limited
A further problem with achieving short response times is that a favorable bypass flow of the measuring gas must still be ensured on a correspondingly miniaturized measuring device
Of course, in the case of miniaturization of such measuring devices, contamination can also play a significant negative role and must therefore be avoided

Method used

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  • Device for measuring paramagnetic oxygen and method for manufacturing and operating the said device for measuring oxygen
  • Device for measuring paramagnetic oxygen and method for manufacturing and operating the said device for measuring oxygen
  • Device for measuring paramagnetic oxygen and method for manufacturing and operating the said device for measuring oxygen

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Embodiment Construction

[0045] FIG. 1 shows a plan view of a paramagnetic oxygen measuring device, or a plan view of the interior of the sensor unit or of the measuring chamber, without side covers, ie open. The sample body typically has a length of 2 to 15 mm, a width of 0.5 to 3 mm and a height of 0.1 to 2 mm and consists of two compartments which are connected to each other via a bridge. Alternatively, the sample body can be designed as hollow or solid. The proportion selection of the empty chamber and the solid part on the sample body is determined by adjusting the required moment of inertia. According to the situation described here, the wall thickness of the bridge piece is 0.1mm, and the width is 0.2mm. The sample body, the spring parts and the assembly frame or holding frame are all made of silicon in one piece, for which purpose the individual parts are formed in their structure by etching methods such as anisotropic wet etching or anisotropic reaction Reactive ion etching, manufactured fr...

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Abstract

The present invention relates to a paramagnetic oxygen-measuring device and the method of making and operating the oxygen-measuring device. Here, to reach the target of realizing the short reaction time, can properly miniaturize the measuring device; besides, the measuring device is provided with high function integration, can be made according to the equipment parameter which has reproducibility. The other purpose is, it can realize the circumferential motion with an appropriate mode, makes it can be adapted with miniaturized measuring chamber, thereby obtaining a measuring device with short reaction time, the invention presents the following designs: the sample body is hold at a spring mechanism, and is arranged in a assembling frame; the sample body, the spring mechanism and the material of assembling frame is integrated-connected to each other, and is formed according to the planar construction mode.

Description

technical field [0001] The invention relates to a paramagnetic oxygen measuring device and methods for producing and for operating such an oxygen measuring device, as described in the preambles of claims 1 , 2 , 3 and 21 , 22 and 23 . Background technique [0002] In the prior art, two main measurement methods are known for measuring the oxygen content in gas mixtures. In so-called solid electrolyte sensors operating on the basis of a zirconium oxide surface, chemical reactions lead to an ion flow which produces a measuring effect proportional to the oxygen content. Forming another approach are physical sensors that do not presuppose a chemical reaction but use the paramagnetic properties of the oxygen molecule. Oxygen molecules experience a deflecting force along a field strength gradient from one magnetic field to a higher field strength. In this case, a flow around a measuring chamber occurs, into which the magnetic field is introduced via the pole shoe. Thus, an enric...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N24/10
Inventor B·安德列斯H·齐格施米特J·格布哈特P·克里普纳T·鲍尔M·韦茨科P·萨茨
Owner ABB PATENT GMBH
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