Minisize electromagnetic low-frequency vibration energy collecting device

Abstract

The invention discloses a mini-type electromagnetism low frequency energy collector in the field of electronic component which comprises a libration pick up structure, a support structure and a micro-coil structure. The libration pick up structure comprises a metal plane spring and a permanent magnet. The metal plane spring comprises four square spirality elastic arms and a metal platform. The permanent magnet is arranged at the metal platform. The micro-coil comprises a micro-coil winding and an insulated underlay. The metal plane spring and the support structure are integrated as a whole. The libration pick up structure and the support structure are at the micro-coil. The libration pick up structure of the utility model has a natural frequency near to 100 HZ and is easy to satisfy the integrated requirements such as improvement of the low frequency energy collecting efficiency, low production cost and integrated production.

Description

technical field [0001] The invention relates to a collector in the technical field of electronic components, in particular to a miniature electromagnetic low-frequency vibration energy collector. Background technique [0002] The continuous advancement of semiconductor manufacturing technology has led to the development of electronic devices and products in the direction of miniaturization. The emergence of Bluetooth technology and low-power communication standards (such as Zigbee and IEEE802.15.4) has largely promoted the development of miniature wireless sensor networks and communication nodes. Due to the characteristics of low energy consumption, small size, large function, and mass production, MEMS is also developing rapidly. However, compared with the ever-shrinking size of wireless sensing products and MEMS devices, power supply issues are becoming a big obstacle to their development. Powering these systems currently relies primarily on batteries or power lines. Batt...

AI Technical Summary

Problems solved by technology

Batteries have the following disadvantages: short life, limited stored energy, large size and mass compared to the device being powered; high cost and complicated process to replace the battery in some applications

Disadvantages of power lines are: they are expensive, difficult to maintain, and in some embedded systems and structures, the use of wires is simply not possible

Although this design can be implemented using integrated circuit processing technology, it has the following disadvantages: 1) The designed structure has a large natural frequency and a small vibration amplitude, making it difficult to collect low-frequency vibration energy below 100 Hz that exists in large quantities in the external environment 2) The designed structure needs to be fabricated by deep reactive ion etching method, and the processing cost is very high

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