Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer

Abstract

A diamagnetic susceptive mass micro-accelerator with a round and multi-ring axially magnetized permanent magnet in the field of a micro-electro-mechanical system is composed of an upper stator, a rotor and a lower stator, wherein the cylindrical and a multi-ring axially magnetized permanent magnet in the upper and the lower stators provide suspension force and lateral stabilizing force to the diamagnetic rotor to achieve control-free self-stabilized initial levitation and suspension. Meanwhile, the axial rigidity, the lateral rigidity and the impact resistance of the micro-accelerator can be improved by axial detection of the upper and the lower stators, the lateral detection of a feedback electrode and the lower stator and the electrostatic force between the feedback electrode and the rotor, thus enhancing stabilization and suspension performance and lowering the initial levitation process and the initial levitation control difficulty of the rotor. Accordingly, the micro-accelerator can achieve self-stabilization, less power consumption, convenient implementation, small size, and can detect three axial accelerations in X, Y and Z axes and two angular accelerations around the X and the Y axes without complex control mechanism.

Description

technical field [0001] The invention relates to a micro-accelerometer in the field of micro-electromechanical technology, in particular to a circular and multi-ring axially magnetized permanent magnet anti-magnetism sensitive mass micro-accelerometer. Background technique [0002] The inertial navigation system is an autonomous navigation technology that directly calculates the navigation parameters such as the position, heading and attitude of the carrier according to Newton's law of inertia. During the working process, it neither transmits energy to the outside world nor obtains information from the outside. It has unique advantages such as being free from interference, can be used anywhere, has good dynamic performance, and rich navigation output information. It is widely used in the fields of aviation, aerospace and navigation. It has been widely used, and the emergence of MEMS (Micro-electromechanical Systems, micro-electromechanical systems) technology has prompted the...

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Problems solved by technology

[0004] Found through literature search to prior art, in 2002, R Houlihan and MKraft of the University of Southampton in the UK published in J.Micromech.Microeng. The article Modeling of an accelerometer based on a levitated proof mass (based on the modeling of the accelerometer of the suspended detection mass) proposes a disc-shaped rotor electrostatic levitation micro-accelerometer. This type of micro-accelerometer needs to use electrostatic force to overcome gravity to achieve levitation , it can be realized only when the gap between the rotor and the stator is very small, so the process requirements are very high. In addition, they all need a closed-loop feedback control circuit to work normally. The rotor suspension needs to effectively control multiple degrees of freedom. Both support and stable suspension require complex circuit control, which is difficult

This greatly limits its application

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