Method for manufacturing surface antimicrobial, abrasion-proof metal/ceramic nano-multilayer film

A nano-multilayer, surface antibacterial technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve the problems of poor wear resistance, high difficulty and high cost of antibacterial materials, and achieve low cost, The effect of improved pitting potential and good antibacterial function

Active Publication Date: 2008-07-16
HARBIN INST OF TECH
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  • Summary
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of high cost and high difficulty in preparing the overall antibacterial material, and the problem that the surface treated antibacterial material has poor wear resistance, and provides a method for preparing a surface antibacterial and wear-resistant metal / ceramic nano-multilayer film

Method used

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  • Method for manufacturing surface antimicrobial, abrasion-proof metal/ceramic nano-multilayer film
  • Method for manufacturing surface antimicrobial, abrasion-proof metal/ceramic nano-multilayer film
  • Method for manufacturing surface antimicrobial, abrasion-proof metal/ceramic nano-multilayer film

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specific Embodiment approach 1

[0008] Specific embodiment one: the preparation method step of surface antibacterial, wear-resistant metal / ceramic nano multi-layer film in the present embodiment is as follows: one, with magnetron sputtering method, base body is put into the vacuum chamber target table, in the background Vacuum is 10 -4 ~10 -2 Under the condition of Pa, pass in argon gas and use argon ions to sputter and clean the substrate for 15-30 minutes; 2. The gas flow ratio of argon gas to one of the three gases of nitrogen, acetylene or methane is 2-17:1, The total air pressure is 0.1-1.0Pa, the magnetron sputtering current is 0.2-50A, the sputtering voltage is 300-600V, the substrate bias voltage is -50--400V, and the deposition temperature is 80-400°C. Metal target 1 and metal target 2 are used to sputter the target, so that the metal layer and the ceramic layer are alternately deposited, and the thickness cycle of each layer is 2nm to 500nm. The outermost layer of the final film layer is a ceramic...

specific Embodiment approach 2

[0010] Embodiment 2: This embodiment differs from Embodiment 1 in that the substrate in Step 1 is ceramics, plastics, stainless steel, high-speed steel, hard alloy or aluminum alloy, and the others are the same as Embodiment 1.

specific Embodiment approach 3

[0011] Embodiment 3: This embodiment is different from Embodiment 1 in that the magnetron sputtering in step 1 is DC magnetron sputtering or RF magnetron sputtering, and the others are the same as Embodiment 1.

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Abstract

The invention which discloses a preparation method for metal/ceramic nanometer multilayer films with antibacterial and wear resistant surfaces relates to a preparation method for nanometer multilayer films and solves the problem of high cost and great difficulty in preparing wholly antibacterial materials and low wear resistance of surfaced treated antibacterial materials. The method comprises the following steps: a magnetron sputtering method is adopted, the background vacuum degree is 10<- 4> to 10<- 2> Pa; sputtering against targets in the conditions of the gas flow ratio of 2 to 17:1 of argon to one gas of the three gases of nitrogen, acetylene or methane, total air pressure of 0.1 - 1.0Pa, magnetron sputtering currents of 0.2 - 50A, voltage of 300 - 600V, substrate bias voltage of minus 50 to minus 400V and deposition temperatures of 80 - 400 DEG C. The nanometer ceramic/metal multilayer films prepared by the invention have good wear resistance and the antibacterial rate of more than 95 percent; the invention has the advantages of no pollution, low cost, easy realization and good industrial application prospects.

Description

technical field [0001] The invention specifically relates to a preparation method of a nanometer multilayer film. Background technique [0002] Harmful bacteria cause great harm to people's health and life. Antibacterial materials include overall antibacterial and surface treatment antibacterial. Integral antibacterial is to add a small amount of antibacterial agent in the material preparation process to obtain the antibacterial performance of the material. The surface of the integral antibacterial material has long-lasting antibacterial properties and will not lose the antibacterial effect due to surface wear. However, the overall addition of Cu or Ag to the matrix increases the cost, and the overall addition of antibacterial agents will increase the difficulty of material preparation. Compared with the overall antibacterial type, the surface treatment antibacterial has more advantages. Antibacterial surface treatment can be carried out on almost any material, and can obt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
Inventor 田修波韦春贝杨士勤
Owner HARBIN INST OF TECH
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