Minute structure and information recording medium
A microstructure and recording medium technology, applied in data recording, information storage, recording information storage, etc., can solve problems such as rough ends of protruding parts, and achieve low-cost effects
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Embodiment 1
[0149] Figure 1A and 1B The configuration of an information recording medium 100A according to Embodiment 1 of the present invention is shown. Figure 1A is a cross-sectional view of the information recording medium, Figure 1B It is a top view of the information recording medium.
[0150] In the information recording medium 100A, 50nm thick ZnS-SiO 2 A dielectric layer 102 (with a molar ratio of 8:2), a light absorbing layer 103 of AgInSbTe with a thickness of 10 nm, and a microstructure 104 were formed on a silicon substrate 101 with a thickness of 1 mm and a size of 10 cm×10 cm.
[0151] The tiny structure 104 is arranged as Figure 1B As shown, and the information is judged by the presence or absence of the microstructure 104 . Specifically, when the information recording medium 100A is irradiated with a laser beam, the microstructure 104 emits fluorescence, and the area 105 where the microstructure 104 is not arranged does not emit fluorescence, so the recording mediu...
Embodiment 2
[0159] Figure 3A and 3B The structure of the information recording medium 100B of Example 2 is shown. Figure 3A is a cross-sectional view of the information recording medium, Figure 3B It is a top view of the information recording medium.
[0160] In the information recording medium 100B, 50nm thick ZnS-SiO 2 A dielectric layer 102 (with a molar ratio of 8:2), a light-absorbing layer 103 of Ge (germanium) having a thickness of 10 nm, and microstructures 104 are formed on a polycarbonate substrate 110 . The polycarbonate substrate 110 is a disc-shaped plate for an optical disk with a diameter of 12 cm and a height of 20 nm, and has lands and grooves with a period of 440 nm (track pitch).
[0161] The tiny structure 104 is arranged as Figure 3B As shown, and the information is judged by the presence or absence of the microstructure 104 . Specifically, when the information recording medium 100B is irradiated with a laser beam, the microstructures 104 emit fluorescence, ...
Embodiment 3
[0170] Investigate pulsed light output dependence of tiny structures. The pulsed light output is varied from 1.5 to 7mW. The fabrication method of the microstructure is the same as in Example 2. For this microstructured material, ZnS-SiO 2 (The molar ratio is 8:2).
[0171] Figure 4A to Figure 9B A scanning electron micrograph of the produced microstructure is shown. This observation was performed using a field emission scanning electron microscope of FE-SEM S-4100 (manufactured by Hitachi Ltd.).
[0172] exist Figure 4A to Figure 9B In , both the SEM photos collected from the top surface direction and the SEM photos collected from the oblique direction are shown. It is evident from these SEM photographs that the configuration of the microstructures, including height and width, changes as the pulsed light output changes.
[0173] In Embodiment 3, even when the microstructure is formed in any of the configurations shown, it can be used as an information recording mediu...
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Abstract
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