Method for manufacturing high-efficiency silicon solar cell sheet

Abstract

The invention provides a method for preparing highly effective silicon solar cell sheet, which includes: directly printing or spraying oxide phosphorus source or silicon dioxide phosphorus latex source on a P-type silicon sheet; directly forming a concentrated phosphorus diffusion region pattern used as concentrated phosphorus diffusion source; diffusing in phosphorus oxychloride ambience to a transverse N+N high and low junction for one time; etching periphery, removing phosphorus silicon glass, depositing silicon nitride film, silk screen printing front back electrode and back aluminum, passivating by hydrogen and sintering. The method only needs one time diffusion to form a N+N high and low homojunction and dose not need growing silicon dioxide to screen and forming a concentrated and thin phosphorus twice diffusion region by twice photoetching, so that a plurality of working procedures such as oxidization, photoetching and twice diffusion can be saved, conversion efficiency is increased.

Description

technical field [0001] The invention relates to a process method for manufacturing high-efficiency silicon solar cells. Background technique [0002] The research work on the manufacture of high-efficiency silicon solar cells based on the theoretical basis of "purple batteries" has been carried out for more than ten years, but it still stays in the theoretical guidance and has not really been applied to commercial production. The fundamental reason is that the manufacturing process is restricted by the original traditional process concept. To achieve the goal of high conversion efficiency, it is necessary to add multiple processes, which will lead to a series of increases in production costs. Researching a compromise and simple process method to reduce the recombination of surface photogenerated carriers has become the goal that everyone pursues. [0003] On the basis of the "purple battery", if you continue to reduce the junction depth or change its surface doping concentr...

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Problems solved by technology

This method is difficult to process, inefficient and high in production cost

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