Fault handling process for temperature-controlling thermal couple of polysilicon ingot furnace

A troubleshooting method and polysilicon ingot furnace technology, applied in polycrystalline material growth, chemical instruments and methods, single crystal growth, etc., can solve problems such as temperature drop, affect silicon ingot production, and difficulty in rapid replacement, and achieve easy implementation , Troubleshooting method and reliable effect

Inactive Publication Date: 2008-11-26
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Application Information

AI Technical Summary

Problems solved by technology

The whole process of the ingot casting process is vacuumed. Because the temperature control thermocouple is placed in high temperature and vacuum state for a long time and the carbon element volatilized by the graphite heater at high temperature penetrates into the thermocouple protection ceramic tube and the platinum and rhodium wire material, etc., it is easy to Cause thermocouple breakage, aging, failure, vacuum leakage
Once the temperature control thermocouple fails, it will seriously affect

Method used

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  • Fault handling process for temperature-controlling thermal couple of polysilicon ingot furnace
  • Fault handling process for temperature-controlling thermal couple of polysilicon ingot furnace

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Embodiment Construction

[0027] When the temperature control thermocouple 5 is working normally, the furnace temperature is detected by the temperature control thermocouple 5, which is connected to the thermocouple input module 1, and then the thermocouple input module 1 converts the analog signal into a digital signal and sends it to the controller 3. Comparing the temperature setting value with the temperature controller 3, the heating power setting value (0.0-100.0%) of the temperature closed-loop control is calculated, and the standard control signal 4.020.0mA is output by the D / A module 2, and sent to the AC three-phase intelligent controllable The control end of the silicon power controller 6 makes the heating power change linearly within the range of 0-165kW. Its AC three-phase intelligent thyristor power controller 6 has a power output of 380V / 250A, controls the main transformer 4, converts it into a low-voltage and high-current 25V / 3800A power output through the main transformer 4, and is dire...

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Abstract

The invention discloses a treatment method of temperature control thermocouple fault of a polysilicon ingot furnace. When the temperature control thermocouple has fault, the closed-loop temperature control of the temperature control thermocouple is converted into open-loop power control to control the heating power. The invention has a realization method that when the temperature control thermocouple is normally working, the temperature characteristic data of the heater are stored for every interval time; when the temperature control thermocouple has fault, the stored temperature characteristic data of the previous furnace is taken out to trace the trail of the setting value of the heating power and to directly control the heating power of the heater to realize the open-loop temperature control. The treatment method of temperature control thermocouple fault of the polysilicon ingot furnace is reliable and is easy to be realized, which can enhance the reliability of the equipment to the maximum limit and can satisfy the requirement of safety production of the polycrystalline silicon ingot furnace.

Description

technical field [0001] The invention relates to an emergency response measure for a temperature-controlling thermocouple failure of an industrial furnace, and further refers to a method for treating the failure of a polycrystalline silicon ingot furnace temperature-controlling thermocouple failure. Background technique [0002] At present, the production process for preparing silicon ingots for solar cells mainly includes single crystal silicon pulling and polycrystalline silicon pulling. Polysilicon ingot casting technology has become the mainstream method for preparing silicon ingots for solar cells because it can directly melt and cast square silicon ingots suitable for large-scale production, and the manufacturing process is relatively simple. [0003] To prepare large-sized square ingots for solar polycrystalline silicon cells, 240-270kg of silicon material is loaded at a time, and the products are very expensive, worth more than RMB 500,000. Its production process inc...

Claims

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Application Information

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IPC IPC(8): C30B29/06C30B28/06
Inventor 肖益波陈国红童晖
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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