Polysilicon directional freezing equipment
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- QINGDAO NEW ENERGY SOLUTIONS
- Publication Date
- 2008-12-17
- Estimated Expiration
- Not applicable · inactive patent
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Figure 1
Abstract
Description
technical field
[0001] The invention belongs to the technical field of purifying polysilicon by physical metallurgy technology, in particular to a device for smelting polysilicon by directional solidification. Background technique
[0002] High-purity polysilicon is the main raw material for solar cells. The preparation of high-purity polysilicon abroad mainly uses the Siemens method, specifically the silane decomposition method and the gas-phase hydrogen reduction method of chlorosilane, in which SiHCl 3 The Siemens method is currently the mainstream technology for polysilicon preparation. SiHCl 3 The useful deposition ratio of the method is 1×10 3 , is SiH 4 100 times. The deposition rate of the Siemens method can reach 8-10 μm / min. The conversion efficiency of one pass is 5% to 20%, and the deposition temperature is 1100°C, second only to SiCl 4 (1200°C), the power consumption is about 120kWh / kg, and the power consumption is also relatively high. Domestic SiHCl 3...