Spectral measurement apparatus and method of phase-change thin film micro-zone

A kind of spectral measurement and thin film technology, which is applied in the field of phase change thin film micro-area spectral testing devices

Inactive Publication Date: 2008-12-17
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

Although it can be used for spectroscopic analysis of micro-sized samples, the above...

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  • Spectral measurement apparatus and method of phase-change thin film micro-zone
  • Spectral measurement apparatus and method of phase-change thin film micro-zone

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Embodiment Construction

[0029] The structure and measurement process will be further described in detail below in conjunction with an embodiment provided by the accompanying drawings of the present invention.

[0030] see first figure 1 , figure 1 It is a structural schematic diagram of an embodiment of a phase-change thin film micro-area spectrum measuring device of the present invention. The phase-change film micro-area spectrum measuring device of this embodiment is composed of a light source, an aperture, a light chopper, a first half mirror 4, and a second half mirror. Two half mirrors 5, the third half mirror 6, objective lens 7, imaging lens 9, first lens 10, first spectrometer 11, first photodetector 12, lock-in amplifier 13, second photodetector 14 , second spectrometer 15, second lens 16, third lens 17, acousto-optic device 18, fourth lens 19, beam expander 20, laser 21, attenuation sheet 22, CCD detector 23 and computer 24 constitute, its positional relationship As follows: the light emi...

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Abstract

A device and a method for measuring the micro-zone spectrum of a phase-transformation film are provided. The device comprises a light source, a light diaphragm, a light chopper, a second dichroic mirror, a third dichroic mirror, an object lens, an imaging lens, a first lens, a first spectrometer, a first photoelectric detector, a phase-lock amplifier, a second photoelectric detector, a second spectrometer, a second lens, a third lens, an acousto-optic device, a fourth lens, an expander, a laser and a computer. The device can detect the micro-domain transmission spectrum and reflection spectrum of a sample to be tested before and after the laser-induced phase transformation under different laser excitation conditions including different laser power, pulse widths, repetition frequencies and action times, and can be applied in evaluating the micro-domain optical response characteristic and the photo-thermal stability of the phase-change film.

Description

technical field [0001] The invention relates to an optical thin film, in particular to a phase-change thin film micro-region spectrum testing device and a measuring method. technical background [0002] The change of the spectrum comes from the phase transition of the material structure, so the change of the material structure can be studied through the measurement of the material spectrum. However, ordinary spectrometers often have large errors in the measurement of small areas of micron size. For phase change thin film materials, the structural phase change is generally studied by heating annealing method, but if heating with a small laser beam, it is difficult to locate the small phase change area for measurement with an ordinary spectrometer. Literature (referring to literature 1, Guo Honglian, Cheng Bingying, etc., the application of micro-area spectroscopy technology in cell biology, Acta Quantum Electronics, Vol.19, No3, 2002: 223-225) reported a method for the measu...

Claims

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Application Information

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IPC IPC(8): G01N21/59G01N21/55G01N21/27
Inventor 翟凤潇魏劲松王阳吴谊群
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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