Spherical parts batch plasma based ion injection method and apparatus thereof

An ion implantation device and plasma technology are applied in ion implantation plating, metal material coating process, coating and other directions, which can solve the problems of uneven implantation and the inability to achieve uniform processing effect of spherical parts, and achieve uniform processing effect, Improve the service life and prevent the effect of arcing
CN101353777AInactive Publication Date: 2009-01-28HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HARBIN INST OF TECH
Publication Date
2009-01-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a spherical-component batch plasma-based ion implantation method and a device thereof, relating to a spherical-component plasma-based ion implantation method and a device thereof and aiming at the problem that the plasma-based ion implantation of spherical components which is carried out to spherical components by adopting a device and a method of rotary-workpiece plasma-based ion implantation is uneven and can not realize the uniform treatment effect of the spherical components of the same batch. The method of the invention comprises the following steps: the spherical components are put in a circular groove of an oblique round plate, the rotation of which is controlled by a driving motor and a gear; the rotation of the driving motor is stopped first, a high-voltage pulse power source is turned on, and after time delay by the high-voltage pulse power source, plasma-based ion implantation is carried out to the spherical components; and the starting and stopping of the driving motor and the high-voltage pulse power source are kept synchronously switched. The device of the invention comprises: a synchronous switching controller provides the driving motor and the high-voltage pulse power source with power by No. 1 and No.2 power sources; an output shaft of the driving motor is fixedly provided with a driving gear which is meshed with a driven gear. The device and the method can uniformly implant the surface irons of the spherical components.
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Description

Technical field

[0001] The invention relates to a plasma-based ion implantation method and device for spherical parts, and belongs to the technical field of plasma-based ion implantation. Background technique

[0002] Plasma-based ion implantation technology can achieve low-temperature surface modification of precision parts. Its characteristic is that it does not change the dimensional accuracy of the processed parts, and the temperature can be controlled at room temperature or slightly higher than room temperature, and can be used for all parts in a plasma environment. The surface is implanted at the same time, so this technology can realize batch processing. The basic principle of this technology is to form a plasma space around the workpiece. When a negative high voltage pulse is applied to the workpiece, the plasma is affected by the electric field on the workpiece to form a positive ion sheath around the workpiece. The electric field force is injected into the surface of th...

Claims

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