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Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube

A positive bias tube and hollow cathode technology, applied in the direction of plasma, discharge tube, electrical components, etc., can solve the problems of plasma difficulties, achieve high utilization rate and reduce diameter

Active Publication Date: 2009-02-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The object of the present invention is to provide a device and method for injecting ions into the inner surface of a hollow cathode coupling positive bias tube to solve the problem of difficult plasma generation in a thinner tube

Method used

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  • Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube
  • Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube
  • Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube

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specific Embodiment approach 1

[0009] Specific implementation mode one: combine figure 1 Describe this embodiment, the device for implanting ions on the inner surface of the hollow cathode coupled positive bias tube of this embodiment is composed of a gas source chamber 1, a vacuum chamber 11, an insulating ventilation tube 2, a radio frequency power supply system 3, a matching protection circuit 4, and a cable 5 , a high-voltage cable 12, a low-pass filter 6, a high-voltage pulse power supply 7, an insulator 8, and a hollow cathode tube 9; One end of 9 is set on the central axis in the workpiece tube 10, the other end of the hollow cathode tube 9 passes through the vacuum chamber 11 and is connected to one end of the insulating vent pipe 2, and the other end of the insulating vent pipe 2 is connected to the gas source chamber 1. The output ends are connected, the insulator 8 is set on the hollow cathode tube 9 and fixed in the center hole of the input end face of the vacuum chamber 11, the positive pole of...

specific Embodiment approach 2

[0010] Specific implementation mode two: combination figure 1 The present embodiment will be described. The inner diameter of the hollow cathode tube 9 in the present embodiment is 0.5-20 mm. When the hollow cathode tube 9 adopts cathode materials such as Cr, Ti or Zr, a pure metal coating can be obtained on the inner surface of the workpiece tube 10 .

specific Embodiment approach 3

[0011] Specific implementation mode three: combination figure 1 To describe this embodiment, the connection point where the high voltage cable 12 is connected to the hollow cathode tube 9 in this embodiment is located between the insulating ventilation pipe 2 and the insulator 8 .

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Abstract

A device for injecting ions into the inner surface of a hollow cathode coupling positive bias pipe and a method thereof relate to a method for injecting ions into the inner surface of a pipe and a device thereof. The invention solves the problem of difficult plasma generation in a relatively thin pipe. The device is structurally characterized in that one end of a hollow cathode tube (9) is installed in a workpiece pipe (10); the positive pole of a high-voltage impulse power source (7) is connected to the hollow cathode tube (9) through a low pass filter (6); and a radio-frequency power supply system (3) is connected to the hollow cathode tube (9) through a matching protection circuit (4). The method comprises the following steps of that a gas generates plasmas in the hollow cathode tube under the effect of radio-frequency pulse; and the plasmas fly to the inner walls of the workpiece pipe (10) to form the plasma injection under the effect of the electric field. The invention has the advantages that the diameter\ of the workpiece pipe to be processed is reduced and the generation of plasmas get easier through putting the hollow cathode tube in the workpiece; and the plasma injection rate on the inner surface of the workpiece pipe is increased through locating the hollow cathode tube on impulse positive bias.

Description

technical field [0001] The invention relates to a device and a method for injecting ions into the inner surface of a tube, in particular to a device and a method for injecting ions into the inner surface of a hollow cathode coupling positive bias tube. Background technique [0002] Since the linearity of ion walking during ion implantation has great restrictions on the injection of the inner wall of the tube, the slenderness ratio of the processed tube should not be too large, otherwise the ions will be incident obliquely during ion implantation, and the effect of ion implantation cannot be achieved. . If the ion implanter can directly inject the inner wall vertically inside the tube, this requires a large tube, which is actually unrealistic. Therefore, it is necessary to generate plasma inside, and then apply a negative bias voltage on the cylinder to attract ions and finally form the ion implantation effect. Generating plasma inside a tube is also not an easy task, espec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46H01J37/32
Inventor 田修波巩春志杨士勤
Owner HARBIN INST OF TECH
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