Laser induced plasma temperature spatial distribution detecting device and detecting method

Abstract

The invention relates to a detection facility for the temperature spatial distribution of laser induced plasmas and a method thereof. The method comprises: using multi-beam optical fibers as the detection and transmission medium, using a two-dimension moving stage to realize accurate location, using a row of multi-beam optical fibers to collect and output the spectrum of one section of the laser induced plasmas and using a spectrometer to record collected signals; treating the recorded spectrum signals via an inverse transformation algorism to fit a light intensity curve, using a relative light intensity method to obtain the temperatures of a plurality of points of the section and obtain the two-dimension temperature distribution of the section. Optionally, the invention can utilize multiple rows of the multi-beam optical fibers to synchronously detect a plurality of sections of the plasmas to obtain three-dimension temperature distribution. The detection facility for the temperature spatial distribution of laser induced plasmas and the method thereof can detect high temperature and obtain high accuracy, which can be applied for laser processing online detection, quality control and mechanism research, and can be generalized for all spectroscopic light source researches.

Description

Technical field: [0001] The invention relates to a spectrum measurement method in the field of mechanical engineering, in particular to a detection device and a detection method for the spatial distribution of photoinduced plasma temperature. Background technique: [0002] The method of studying the structure of substances and determining the chemical composition of substances based on the characteristic spectrum of atoms is called atomic emission spectroscopy. Plasma is currently the most widely used light source for atomic emission spectroscopy. At present, the use of plasma emission spectrometry to detect plasma emission spectra has become an important means of component analysis of inorganic samples, and is widely used in the analysis fields of chemical industry, geological minerals, metal materials, environmental detection and biological samples. [0003] Among them, the photoplasma is the plasma generated by the laser acting on the surface of the metal workpiece. Las...

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Problems solved by technology

[0009] The above measurement methods can only measure the temperature of the plasma at a single point, but cannot obtain the spatial distribution information of the plasma state parameters, and cannot obtain the two-dimensional temperature distribution of different cross-sections of the plasma and the three-dimensional temperature distribution of the entire plasma, which seriously hinders the measurement of the plasma temperature. internal research

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