Mechanical-etching composite processing method for continuous surface quartz micro-optical elements

A composite processing and micro-optical technology, applied in optical components, optics, lenses, etc., can solve problems such as low controllability, poor uniformity of lithography technology, and limited materials for ultra-precision processing technology.

Active Publication Date: 2018-01-05
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0006] In view of the problem that the existing technology in the above background technology cannot realize the high-quality production of continuous surface quartz micro-optical elements, the purpose of the present invention is to propose a method that adopts polymer coating and curing, ultra-precision processing masks, plasma etching transfer, etc. The processing method of quartz micro-optical components in the technological process can simultaneously solve the problems of poor uniformity, low controllability of lithography technology and limited materials of ultra-precision processing technology, and realize large-area, high-precision, high-uniformity continuous surface micro-optic of quartz Components can be controlled

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  • Mechanical-etching composite processing method for continuous surface quartz micro-optical elements
  • Mechanical-etching composite processing method for continuous surface quartz micro-optical elements
  • Mechanical-etching composite processing method for continuous surface quartz micro-optical elements

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Embodiment 1

[0032] This embodiment provides a continuous surface-shaped quartz micro-optical element mechanical-etching composite processing method, specifically a continuous surface-shaped quartz Fresnel lens manufacturing method, the implementation steps are as follows figure 1 As shown, the details are as follows: (1) The photosensitive adhesive NOA61 is coated on the quartz substrate by spin coating, and the photosensitive adhesive is cured under the irradiation of 365nm light emitted by the ultraviolet exposure machine, and the irradiation meter is about 100mJ / cm 2 , in order to improve the cutting performance of the photosensitive adhesive, it was baked in a 60-degree oven for 30 minutes, and the obtained quartz-coated photosensitive adhesive sample was as follows: figure 2 shown. (2) Photosensitive adhesive continuous surface Fresnel lens mask turning processing, Fresnel lens depth 8um, minimum ring width 100um, area diameter 50mm. Using a diamond tool with a radius of 0.02mm, th...

Embodiment 2

[0036] This embodiment provides a mechanical-etching composite processing method for a continuous surface-shaped quartz micro-optical element, specifically a method for manufacturing a continuous surface-shaped microlens array, and the implementation steps are as follows:

[0037] (1) Coat PMMA with a leveling method on the quartz substrate, and bake in a 70-degree oven for 30 minutes to fully solidify the PMMA;

[0038](2) PMMA continuous surface-shaped microlens array mask turning process, the side length of the microlens array is 3um, the depth is 600nm, and the area diameter is 20mm. Turning is used to smooth PMMA, the spindle speed is 3000rpm, the feed rate of the Z axis is 20um, the feed rate of the X direction is 10mm / min, the feed rate of the finish car is 5um, and the feed rate of the X axis is 2mm / min. Prepare the processing program, use the diamond sharp knife, use the milling axis to process, the milling axis speed is 30000rpm, the feed rate of the Z axis is 1um, t...

Embodiment 3

[0042] This embodiment provides a mechanical-etching composite processing method for continuous surface-shaped quartz micro-optical elements, specifically a method for manufacturing a quartz columnar lens array, and the implementation steps are as follows:

[0043] (1) Apply photoresist AZ9260 by spin coating on the quartz substrate, 1000rpm, 30s; bake on a 100 degree hot plate for 10min, so that the photoresist is fully cured;

[0044] (2) Photoresist continuous surface cylindrical lens array mask turning processing, the cylindrical lens array has a side length of 500um, a depth of 11um, and an area diameter of 20mm. Turning is used to smooth PMMA, the spindle speed is 3000rpm, the feed rate of the Z axis is 20um, the feed rate of the X direction is 10mm / min, the feed rate of the finish car is 5um, and the feed rate of the X axis is 2mm / min. Prepare the processing program, adopt the Y-axis planing processing technology, the Y-axis movement speed is 600mm / min, the Z-axis rough...

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Abstract

The invention provides a mechanical-etching combined processing method of continuous surface quartz micro-optical elements. The mechanical-etching combined processing method of the continuous surface quartz micro-optical elements mainly includes a coating and curing process flow by using polymer materials, a mask ultra-precision cutting process flow by using a diamond, and a plasma etching process. The method can realize the high precision production of micro-optical elements of quartz material micro lens arrays, micro-column lenses, Fresnel lenses, provides an effective solution scheme for the accurate production of ultraviolet band high quality micro-optical elements, and prompts the development of small-scale, integrating, and compact type photoelectric devices.

Description

technical field [0001] The invention relates to a novel micro-nano processing method, in particular to a mechanical-etching composite processing method for continuous surface-shaped quartz micro-optical elements, which belongs to the category of micro-nano optics. Background technique [0002] Continuous surface-shaped quartz micro-optical elements can realize high-power laser shaping in the ultraviolet to near-infrared bands. They have many advantages such as large spectral bandwidth, high ultraviolet transmittance, good thermal stability, and corrosion resistance. They are widely used in laser processing, laser Systems such as medical treatment, laser ranging, and laser communication are the core components of modules such as beam homogenization, beam collimation, beam coupling, and beam wavefront transformation. more important role. [0003] At present, continuous surface quartz micro-optical elements are mainly produced by photolithography and etching methods such as ho...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00
CPCG02B3/0012G02B3/0025
Inventor 张为国朱国栋张东熊欣刘风雷史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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