Method for processing rotary part by forming electrode air plasma

Abstract

The invention relates to a method for processing a rotary part by forming electrode air plasma, and belongs to the technical field of the processing of a silicon carbide or melted quartz type silicon-based material rotary part by plasma, which aims at solving the problems of low processing efficiency and poor quality of the existing method. The method comprises the following steps of 1, connecting the upper end surface of a rotary forming electrode with a rotary shaft; 2, clamping a to-be-processed part on an object bearing platform; 3, enabling the rotary forming electrode to be close to the to-be-processed surface of the to-be-processed part; 4, preheating a radio frequency power source and a mixed plasma air source; 5, enabling the rotary forming electrode to do rotary movement, and starting the radio frequency power source; 6, controlling the movement track of the rotary forming electrode and the dwelling time on the part surface; and 7, taking out the to-be-processed part. The method has the advantages that the forming electrode air plasma is utilized for processing, so the removal of full-surface reflection is realized; and meanwhile, the problems existing in the processing efficiency and quality of a high-precision rotary part are solved.

Description

Technical field [0001] The invention belongs to the technical field of plasma processing silicon carbide or fused quartz and other silicon-based material rotary parts. Background technique [0002] In recent years, for high-precision rotating parts, such as hemispherical gyro resonators, large-curvature aspheric optical lenses, concentrating aspheric lenses, etc., the demand for aerospace, military, energy, and chip manufacturing fields has become stronger and stronger. The surface requirements are getting more and more demanding. The processed surface needs to reach the surface roughness value of Ra 1nm, and strictly limit the damage of the material surface and subsurface layer caused by the processing process. Because these parts are mostly brittle, hard and difficult-to-machine materials such as silicon carbide and fused silica, traditional ultra-precision grinding and subsequent polishing processes have problems such as long processing cycles, damage to processed surfaces an...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a method for processing rotary parts with forming electrode atmospheric plasma, in order to solve the processing efficiency and quality problems of high-precision rotary parts, thereby greatly shortening the processing cycle and effectively reducing processing costs to meet the needs of aerospace, energy and other fields The question of the demand for such parts

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